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NTIS 바로가기International journal of precision engineering and manufacturing, v.15 no.7, 2014년, pp.1417 - 1422
Cho, Yong-Kyu (Department of Mechanical Engineering, Inha University) , Han, Tae-Heon (Department of Mechanical Engineering, Inha University) , Ha, Seok-Jae (Department of Mechanical Engineering, Inha University) , Lee, Jung-Won (Department of Mechanical Engineering, Inha University) , Kim, Jong-Su (Department of Mechanical Engineering, Inha University) , Kim, Sun-Min (Department of Mechanical Engineering, Inha University) , Cho, Myeong-Woo (Department of Mechanical Engineering, Inha University)
We developed a maskless lithography system using a digital micromirror device (DMD). This system incorporates a light-emitting diode (LED) driver to generate ultraviolet (UV) light, illumination optics using a fly-eye lens, and telecentric projection optics to generate a parallel light source reflec...
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