[논문]수직응력과 압입이론에 기반한 나노스케일 기계가공에서의 크기효과 분석

전은채; 이윤희; 제태진

doi:10.14775/ksmpe.2018.17.6.001

수직응력과 압입이론에 기반한 나노스케일 기계가공에서의 크기효과 분석
Analysis of Size Effect of Nano Scale Machining Based on Normal Stress and Indentation Theories 원문보기

한국기계가공학회지 = Journal of the Korean Society of Manufacturing Process Engineers, v.17 no.6, 2018년, pp.1 - 6

전은채 (울산대학교 첨단소재공학부) , 이윤희 (한국표준과학연구원 융합물성측정센터) , 제태진 (한국기계연구원 나노공정연구실)

Abstract ▼ AI-Helper

Recently nano meter size pattern (sub-micro scale) can be machined mechanically using a diamond tool. Many studies have found a 'size effect' which referred to a specific cutting energy increase with the decrease in the uncut chip thickness at micro scale machining. A new analysis method was suggested in order to observe 'size effect' in nano scale machining and to verify the cause of the 'size effect' in this study. The diamond tool was indented to a vertical depth of 1,000nm depth in order to simplify the stress state and the normal force was measured continuously. The tip rounding was measured quantitatively by AFM. Based on the measurements and theoretical analysis, it was verified that the main cause of the 'size effect' in nano scale machining is geometrically necessary dislocations, one of the intrinsic material characteristics. st before tool failure.

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가설 설정

1. The normal stress can be regarded as the specific cutting energy when a diamond tool is indented vertically.

제안 방법

Intrinsic material characteristics such as dislocation and grain boundary are known to play important roles in the nano scale. This study investigated and analyzed quantitatively how tip rounding and the intrinsic material characteristics affect sub-micro scale machining.

이론/모형

7. The graph of (H/H₀)² versus h was linear for any values of H₀, which means that the normal stress measured in this study follows the Nix-Gao model. When H0=193 MPa, the linear curve has an intercept point at 0.

성능/효과

2. A blunt tip should have larger cross-sectional area than an ideally sharp tip, which makes the normal stress of a blunt tip smaller than the normal stress of an ideally sharp tip. Moreover, representative stress increases with increases of depth in the case of a blunt tip.

참고문헌 (11)

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Kim, M. Y,, Lee, S. P., Kim, J. H. and Ko, T. J., "Machining Characteristics of the Hybrid Machining System Comprising of EDM and Endmilling," Journal of the Korean Society of Manufactruing Process Engineers, Vol. 15, pp. 86-92, 2016.
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Lucca, D. A. and Seo, Y. W., "Effect of tool edge geometry on energy dissipation in ultraprecision machining," Annals of the CIRP, Vol. 42, pp. 83-86, 1993.

상세보기
Dinesh, D., Swaminathan, S., Chandrasekar, S. and Farris, T. N., "An intrinsic size-effect in machining due to the strain gradient," Proc. of 2001 ASME Int. Mech. Eng. Cong. and Expo., New York, New York, USA, pp. 197-204, 2001.
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상세보기
Tabor, D., Hardness of Metals, Clarendon Press, Oxford, UK, 1951.
Jeon, E. c., Kim, J. Y., Baik, M. K., Kim, S. H., Park, J. S. and Kwon, D., "Optimum definition of true strain beneath a spherical indenter for deriving indentation flow curves," Mater. Sci. and Eng. A, Vol. 419, pp. 196-201, 2006.

상세보기
Nix, W. D. and Gao, H., "Indentation size effects in crystalline materials: a law for strain gradient plasticity," J. of the Mech. and Phys. of Solids, Vol. 46, pp. 411-425, 1998.

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