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ELID 연삭을 이용한 비축 비구면 렌즈의 초정밀 가공
Ultra-Precision Machining of Off-Axis Asymmetric Large-area Reflecting Mirror Using ELID Grinding Process 원문보기

한국기계가공학회지 = Journal of the Korean Society of Manufacturing Process Engineers, v.18 no.1, 2019년, pp.9 - 15  

정명원 (경남과학기술대학교 기계공학과) ,  신건휘 (경남과학기술대학교 기계공학과) ,  김건희 (한국기초과학지원연구원 연구장비개발본부) ,  오오모리 히토시 (이화학연구소 오오모리소형재공학연구실) ,  곽태수 (경남과학기술대학교 기계공학과)

Abstract AI-Helper 아이콘AI-Helper

This study focused on the application of ELID mirror-surface grinding technology to the manufacture of off-axis asymmetric large-area reflecting mirrors made of BK7 glass. The size of the parts, such as asymmetric large-area mirrors or lens, made form-accuracy or roughness especially hard to measure...

주제어

AI 본문요약
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제안 방법

  • During truing, the ELID voltage and current were inputted to 90V and 20A, respectively, when using #140, #600, and #2,000 wheels, and 60V and 10A when using the #8,000 wheel. After truing was complete, diameters of BK7 specimen and wheel were measured to create the numerical control (NC) data code, and a total of 10 measurements were obtained to calculate a mean for the dimension reliability. The experimental conditions are summarized in Table 2.
  • In this study, ultra-precision machining experiments were conducted to fabricate a large-area off-axis aspheric reflector mounted in the 8-inch collimator optical system. This study proposed a method to evaluate the surface roughness and surface profile precision of the completed large-area reflector by applying ELID grinding to the cylindrical BK7 glass material using an ultra-precision rotary grinder and measuring the reference workpiece.
  • Since the diameter of the large-area reflector as a workpiece was more than 200 mm, a large 3D shape measurement device was needed to measure the aspheric surface profile precision. Since the size of the workpiece that was fabricated in this experiment exceeded the measurement range of the UA3P device, the shape precision of the reference workpiece was measured to predict the precision of the large-area workpiece. The shape precision of the workpiece was predicted after machining with #2,000 and #8,000 wheels and measuring the reference workpiece in the 3D shape measurement device (UA3P, Panasonic).
  • In this study, ultra-precision machining experiments were conducted to fabricate a large-area off-axis aspheric reflector mounted in the 8-inch collimator optical system. This study proposed a method to evaluate the surface roughness and surface profile precision of the completed large-area reflector by applying ELID grinding to the cylindrical BK7 glass material using an ultra-precision rotary grinder and measuring the reference workpiece.
  • This study proposed a method to predict large-area reflector precision by measuring surface roughness and profile accuracy through the reference workpiece after machining a BK7 glass workpiece with an ultra-precision rotary grinder to fabricate a large-area off-axis aspheric reflector. The ELID grinding machining results using 10 nm resolution of ultra-precision rotary grinder by applying grit sizes of #140, #600, #2,000, and #8,000 sequentially revealed the following conclusions.

대상 데이터

  • To perform the experiments, two workpieces (⌀ 211.5 mm) of a real large-area reflector and one reference workpiece (⌀ 50 mm) were fabricated. They were fixed in the same jig, and off-axis aspheric machining was conducted using an ELID grinding machining.
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참고문헌 (9)

  1. Kim, M. J., Lee, J. K., Yun, Y. G., Lee, H. S., Hwang, Y., Kim, H. J., Kim, J. H., "An Experimental Study of Ultra-Precision Turning of Optical Glass(BK7)", Jorunal of the Korean Society of Manufacturing Technology Engineers, Vol. 20, No. 4, pp. 382-385, 2011. 

  2. Lee, H. S., Kim, M. J., Koo, H. B., Hwang, Y., Kim, H. J., Kim, J. H., "Dutile Regime Parallel Grinding of BK7", Jorunal of the Korean Society of Manufacturing Technology Engineers, Vol. 21, No. 1, pp. 85-89, 2012. 

  3. Kim, D. J., Yoo, K. S., Hyun, D. H., "An Research on Ultra Precisive Polishing Manufacturing Technology of Glass for Micromini and Super Wide-Angle Aspherics Glasses Lens", Jorunal of the Korean Society of Manufacturing Technology Engineers, Vol. 19, No. 2, pp. 275-281, 2010. 

  4. Kim, H. T., Yang, H. J., Kim, S. C., "A Study on the Control Method for the Tool Path of Asherical Surface Grinding and Polishing", Journal of the Korean Society for Precision Engineering, Vol. 23, No. 1, pp. 113-120, 2006. 

  5. Lee, Y. C., Shin, G. H., Kwak, T. S., "Deburring technology of vacuum plate for MLCC lanination using magnetic abrasive polishing and ELID process", Journal of the Korean Society of Manufacturing Process Engineers, Vol. 14, No. 3, pp. 149-154, 2015. 

  6. Ohmori, H., Nakagawa, T., "Analysis of Mirror Surface Generation of Hard and Brittle Materials by ELID grinding with Superfine Grain Metallic Bond Wheels", Annals of the int'l academy for Prod. Eng., Vol.44, No.1, pp. 287-290, 1995. 

  7. Dai, Y., Ohmori, H., Watanabe, Y., Eto, H., Lin, W., Suzuki, T., "Subsurface properties of ceramics for lightweight mirrors after ELID grinding", JSME Series C, Vol 47, No.1, pp. 66, 2004. 

  8. Park, Y., Yang, S., Kim, G., Lee, Y., "The performance improvement of the aspheric form accuracy by compensation machining program", Journal of the Korean Society of Manufacturing Process Engineers, Vol. 4, No. 2, pp. 10-15, 2005. 

  9. Lee, J., Cho, M., Ha, S., Hong, K., Cho, Y., Lee, I., Kim, B., "Analysis of polishing mechanism and characteristics of aspherical lens with MR polishing", Journal of the Korean Society of Manufacturing Process Engineers, Vol. 14, No. 3, pp. 36-42, 2015. 

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