참고문헌 (18)

1. S. Lee, Y. S. Song, H. Kim, and S. O. Ryu, "Characterization of ALD Processed Al 2 O 3 /TiO 2 /Al 2 O 3 Multilayer Films for Encapsulation and Barrier of OLEDs", Semicond. Display Technol., 2017, 16, 1-5. 

2. E. Langereis, M. Creatore, S. B. S. Heil, M. C. M. van de Sanden, and W. M. M. Kessels, "Plasma-assisted Atomic Layer Deposition of Al 2 O 3 Moisture Permeation Barriers on Polymers", Appl. Phys. Lett., 2006, 89, 081915. 

   상세보기

3. C. Y. Chang, C. T. Chou, Y. J. Lee, M. J. Chen, and F. Y. Tsai, "Thin-film Encapsulation of Polymer-based Bulk-heterojunction Photovoltaic Cells by Atomic Layer Deposition", Org. Electron., 2009, 10, 1300-1306. 

   상세보기

4. L. H. Kim, J. H. Jang, Y. J. Jeong, K. Kim, Y. Baek, H. Kwon, T. K. An, S. Nam, S. H. Kim, J. Jang, and C. E. Park, "Highly-Impermeable Al 2 O 3 /HfO 2 Moisture Barrier Films Grown by Low Temperature Plasma-enhanced Atomic Layer Deposition", Org. Electron., 2017, 50, 296-303. 

   상세보기

5. C. A. Wilson, R. K. Grubbs, and S. M. George, "Nucleation and Growth during Al 2 O 3 Atomic Layer Deposition on Polymers", Chem. Mater., 2005, 17, 5625-5634. 

   상세보기

6. T. Nam, Y. J. Park, H. Lee, I. K. Oh, J. H. Ahn, S. M. Cho, H. Kim, and H. B. R. Lee, "A Composite Layer of Atomic-layer-Deposited Al 2 O 3 and Graphene for Flexible Moisture Barrier", Carbon, 2017, 116, 553-561. 

   상세보기

7. Y. Duan, F. Sun, Y. Yang, P. Chen, D. Yang, Y. Duan, and X. Wang, "Thin-Film Barrier Performance of Zirconium Oxide Using the Low Temperature Atomic Layer Deposition Method", Appl. Mater. Interfaces, 2014, 6, 3799-3804. 

   상세보기

8. R. W. Johnson, A. Hultqvist, and S. F. Bent, "A Brief Review of Atomic Layer Deposition: from Fundamentals to Applications" Materials Today, 2014, 17, 236-246. 

   상세보기

9. H. C. Guo, E. Ye, Z. Li, M. Y. Han, and X. J. Loh, "Recent Progress of Atomic Layer Deposition on Polymeric Materials", Mater. Sci. Eng., 2017, 70, 1182-1191. 

   상세보기

10. Y. Liu, S. Welzel, S. A. Starostin, M. C. M. van de Sanden, R. Engeln, and H. W. de Vries, "Infrared Gas Phase Study on Plasma-polymer Interactions in High-current Diffuse Dielectric Barrier Discharge", Appl. Phys., 2017, 121, 243301. 

    상세보기

11. Y. J. Jang and J. Jang, "Surface Treatment and Dyeability of Poly(phenylene sulfide) Films by UV/O 3 Irradiation", Text. Coloration Finish., 2011, 23, 284-289. 

    원문보기 상세보기

12. J. W. Joo and J. Jang, "Photooxidation of Poly(butylene succinate) Films by UV/Ozone Irradiation", Text. Coloration Finish., 2014, 26, 159-164. 

    원문보기 상세보기

13. G. H. Kim, H. N. Hwang, Y. K. Kim, and H. J. Kang, "Effect of Surface Treatment of Polycarbonate Film on the Adhesion Characteristic of Deposited SiOx Barrier Layer", Polymer(Korea), 2013, 37, 373-378. 

14. K. B. Lim and D. C. Lee, "Effects of Plasma Surface Treatment on Electrical and Mechanical Properties of Poly(ethylene terephthalate) Films", Kiis, 2001, 16, 61-67. 

15. S. J. Jeong, Y. Gu, J. Heo, J. Yang, C. S. Lee, M. H. Lee, Y. Lee, H. Kim, S. Park, and S. Hwang, "Thickness Scaling of Atomic Layer Deposited HfO 2 Films and Their Application to Wafer-scale Graphene Tunnelling Transistors", Scientific Reports, 2016, 6, 20907. 

    상세보기

16. T. Tamai, M. Watanabe, Y. Kobayashi, Y. Nakahara, and S. Yajima, "Surface Modification of PEN and PET Substrates by Plasma Treatment and Layer-by-layer Assembly of Polyelectrolyte Multilayer Thin Films and Their Application in Electroless Deposition", RSC Adv., 2017, 7, 33155-33161. 

    상세보기

17. L. Wang, C. Ruan, M. Li, J. Zou, H. Tao, J. Peng, and M. Xu, "Enhanced Moisture Barrier Performance for ALD-Encapsulated OLEDs by Introducing an Organic Protective Layer", J. Mater. Chem. C, 2017, 5, 4017-4024. 

    상세보기

18. S. J. Kim, S. H. Yong, Y. J. Choi, H. Hwangbo, W. Y. Yang, and H. Chae, "Flexible Al 2 O 3 /plasma Polymer Multilayer Moisture Barrier Films Deposited by a Spatial Atomic Layer Deposition Process", J. Vac. Sci. Technol., 2020, 38, 022418. 

    상세보기