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NTIS 바로가기Applied microscopy, v.50 = v.50 no.1, 2020년, pp.2.1 - 2.7
Jeong Eun Chae (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) , Ji-Soo Kim (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) , Sang-Yeol Nam (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) , Min Su Kim (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) , Jucheol Park (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute)
Electron energy loss spectroscopy (EELS) is an analytical technique that can provide the structural, physical and chemical information of materials. The EELS spectra can be obtained by combining with TEM at sub-nanometer spatial resolution. However, EELS spectral information can't be obtained easily...
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