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NTIS 바로가기Nuclear engineering and technology : an international journal of the Korean Nuclear Society, v.53 no.2, 2021년, pp.618 - 625
Lim, Kyung Taek (Department of Nuclear & Quantum Engineering, Korea Advanced Institute of Science and Technology) , Kim, Hyoungtaek (Korea Atomic Energy Research Institute) , Kim, Jinhwan (Department of Nuclear & Quantum Engineering, Korea Advanced Institute of Science and Technology) , Cho, Gyuseong (Department of Nuclear & Quantum Engineering, Korea Advanced Institute of Science and Technology)
In this paper, the single-photon avalanche diodes (SPADs) featuring three different p-well implantation doses (∅p-well) of 5.0 × 1012, 4.0 × 1012, and 3.0 × 1012 atoms/cm2 under the identical device layouts were fabricated and characterized to evaluate the effects of fiel...
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