[논문]초고경도 Ti-Al-Si-N 나노복합체 코팅막의 미세구조 및 트라이볼로지 거동에 관한 연구

허성보; 김왕렬

doi:10.5695/jkise.2021.54.5.230

초고경도 Ti-Al-Si-N 나노복합체 코팅막의 미세구조 및 트라이볼로지 거동에 관한 연구
A Study on Microstructure and Tribological Behavior of Superhard Ti-Al-Si-N Nanocomposite Coatings 원문보기

한국표면공학회지 = Journal of the Korean institute of surface engineering, v.54 no.5, 2021년, pp.230 - 237

허성보 (한국생산기술연구원 첨단하이브리드생산기술센터) , 김왕렬 (한국생산기술연구원 첨단하이브리드생산기술센터)

Abstract ▼ AI-Helper

In this study, the influence of silicon contents on the microstructure, mechanical and tribological properties of Ti-Al-Si-N coatings were systematically investigated for application of cutting tools. The composition of the Ti-Al-Si-N coatings were controlled by different combinations of TiAl2 and Ti4Si composite target powers using an arc ion plating technique in a reactive gas mixture of high purity Ar and N2 during depositions. Ti-Al-Si-N films were nanocomposite consisting of nanosized (Ti,Al,Si)N crystallites embedded in an amorphous Si3N4/SiO2 matrix. The instrumental analyses revealed that the synthesized Ti-Al-Si-N film with Si content of 5.63 at.% was a nanocomposites consisting of nano-sized crystallites (5-7 nm in dia.) and a three dimensional thin layer of amorphous Si3N4 phase. The hardness of the Ti-Al-Si-N coatings also exhibited the maximum hardness value of about 47 GPa at a silicon content of ~5.63 at.% due to the microstructural change to a nanocomposite as well as the solid-solution hardening. The coating has a low friction coefficient of 0.55 at room temperature against an Inconel alloy ball. These excellent mechanical and tribological properties of the Ti-Al-Si-N coatings could help to improve the performance of machining and cutting tool applications.

주제어

표/그림 (8)

그림 Fig. 1. Schematic diagram (top-view) of the cathodic arc ion plating system for the Ti–Al–Si–N films
그림 Fig. 2. Surface image and RMS roughness of Ti-Al-Si-N coatings with various Si contents. (a) As-deposited(substrate), (b)Ti-Al-Si(1.54 at.%)-N, (c)Ti-Al-Si(3.86 at.%)-N, (d)Ti-Al-Si(5.63 at.%)-N, (e)Ti-Al-Si(6.97 at.%)-N
표 Table. 1. Composition of Ti–Al–Si–N coating films with TiAl₂ and Ti₄Si target currents by XPS analysis.
그림 Fig. 3. XRD patterns of the Ti–Al–Si–N coatings with various Si contents.
그림 Fig. 4. XPS spectra of (a)Ti 2p, (b)Al 2p, (c)Si 2p, (d)N 1s, (e)O 1s for the Ti-Al-Si(5.63 at.%-N coating.
그림 Fig. 5. TEM images of Ti-Al-Si-N coating (a) Dark field (b) SADP (c) HR-TEM (d) Inverse FFT image for the Ti-Al- Si(5.63 at.%)-N sample.
그림 Fig. 6. Hardness and elastic modulus of the Ti-Al-Si-N coatings as a function of Si content.
그림 Fig. 7. H/E and H³/E² ratio of Ti-Al-Si-N coatings as a function of Si content.

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