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NTIS 바로가기한국표면공학회지 = Journal of the Korean institute of surface engineering, v.55 no.6, 2022년, pp.363 - 367
차병철 (한국생산기술연구원 울산본부 첨단정형공정그룹) , 장진규 (울산대학교 첨단소재공학부) , 최진영 (한국생산기술연구원 울산본부 첨단정형공정그룹) , 이인식 (한국생산기술연구원 울산본부 첨단정형공정그룹) , 김대욱 (한국생산기술연구원 울산본부 첨단정형공정그룹) , 김유성 (한국생산기술연구원 울산본부 첨단정형공정그룹) , 김대일 (울산대학교 첨단소재공학부)
Transparent ZnO/Ti/ZnO (ZTZ) tri-layered films were prepared with radio frequency (RF) and direct current (DC) magnetron sputtering on the glass substrate. The thickness of the ZnO and Ti films was kept at 50 and 10 nm to consider the effect of the electron irradiation on the crystallization and opt...
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