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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.4, 2022년, pp.39 - 44
유수호 (한국기술교육대학교 전기.전자.통신공학부) , 김기은 (한국기술교육대학교 전기.전자.통신공학부) , 신영균 (한국기술교육대학교 전기.전자.통신공학부) , 박종운 (한국기술교육대학교 전기.전자.통신공학부)
Using a CFD (computational fluid dynamics) simulation tool, we have offered a design guideline of a slot-die head having a simple T-shaped cavity through an analysis of the fluid dynamics in terms of cavity pressure and outlet velocity, which affect the uniformity of coated thin films. We have visua...
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