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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.1, 2022년, pp.33 - 38
한대성 ((주)디에이치지) , 배규현 (한국섬유기계융합연구원)
This study investigates the outlet temperature of coolant heater based on heat and flow volume conditions. Through computer simulation, the coolant temperature at the outlet was analyzed to investigate the heat and flow volume conditions of the coolant heater, and the optimal conditions were derived...
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