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NTIS 바로가기한국결정성장학회지 = Journal of the Korean crystal growth and crystal technology, v.32 no.3, 2022년, pp.115 - 120
정윤성 (한양대학교 신소재공학과) , 최재호 (한양대학교 신소재공학과) , 민경원 (한양대학교 신소재공학과) , 변영민 (한양대학교 신소재공학과) , 임원빈 (한양대학교 신소재공학과) , 노성훈 (SGC 에너지) , 강남훈 (SGC 에너지) , 김형준 (한국세라믹기술원 엔지니어링소재센터)
A brown ring (hereinafter referred to as BR) on the inner surface of a quartz glass crucible used in the manufacturing process of a silicon ingot for semiconductor wafers was studied. BR is 20~30 ㎛ in size and has an asymmetric brown ring shape. The size and distribution of BR were different ...
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