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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.36 no.5, 2023년, pp.488 - 493
김형민 (가천대학교 전기공학과) , 박상빈 (가천대학교 전기공학과) , 김경환 (가천대학교 전기공학과) , 홍정수 (가천대학교 전기공학과)
The effect of sputtering power on the amorphous Ga2O3 thin film deposited using the radio frequency sputtering system was evaluated. Amorphous Ga2O3 is cheaper and more efficiently fabricated than crystalline Ga2O3, and is studied in various fields such as RRAM, photodetector, and flexible devices. ...
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