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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.23 no.1, 2024년, pp.52 - 55
이윤상 (명지대학교 반도체공학과) , 홍상진 (명지대학교 반도체공학과)
In this paper, a state change study was conducted through Frequency Domain Reflectometry (FDR) technology for the process chamber of plasma equipment for semiconductor manufacturing. In the experiment, by direct connecting the network analyzer to the RF matcher input of the 300 mm plasma enhanced ch...
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