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NTIS 바로가기한국가스학회지 = Journal of the Korean institute of gas, v.28 no.2, 2024년, pp.76 - 83
김민지 (아주대학교 환경공학과) , 이진백 (아주대학교 환경공학과) , 정승호 (아주대학교 환경안전공학과) , 이근원 (아주대학교 환경안전공학과)
In the semiconductor manufacturing process, the Diffusion process generates various reactive by-products. These by-products are deposited inside the pipes of post-processing and exhaust treatment systems, posing a potential risk of substantial dust explosions. In this study, three methods material v...
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