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NTIS 바로가기Journal of non-crystalline solids, v.198/200 pt.1, 1996년, pp.1 - 10
Davis, E.A. (Corresponding author. Tel.: +44-116 252 3571)
AbstractHydrogen incorporated intentionally or inadvertently in silicon is associated with important effects that can be beneficial or detrimental to material properties and device performance. In crystalline or polycrystalline silicon, its role in passivating surfaces and impurities is an important...
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