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1. Sensors & Actuators Delapierre 17 123 1989 10.1016/0250-6874(89)80072-1 Micromachining: a survey of the most commonly used processes 

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2. Petersen 70 420 1982 Silicon as mechanical material 

3. Buser 7 1990 MicroMechanics Europe '90 From the mask layout to the performance of a device: a complete CAD system for micromachined monocrystalline silicon structures 

4. Sensors & Actuators A Sequin 34 225 1992 10.1016/0924-4247(92)85006-N Computer simulation of anisotropic cristal etching 

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5. Sensors & Actuators A Than 45 85 1994 10.1016/0924-4247(94)00820-5 Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model 

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6. J. Micromech. Microeng. Fruhauf 3 113 1993 10.1088/0960-1317/3/3/004 A simulation tool for orientation dependent etching 

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7. Heim 197 1991 Micro System Technologies 91 

8. Clark 20 1987 IEEE Micro Robots and Teleoperators Workshop 

9. Sato 9 1989 JIEE Tech. Meeting Micromachining and Mechatronics Measurement of anisotropic etching rate of single crystal silicon to the complete orientation 

10. J. Electrochem. Soc. Seidel 137 3612 1990 10.1149/1.2086277 Anisotropic etching of crystalline silicon in alkaline solutions 

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11. Brahim-Bounab 1992 Dissolution anisotrope du cristal de siticiom: modele tensoriel macroscopique et formes usinees experimentales 

12. Camon B3 7 142 1996 E.MRS 1995 Spring Meeting, Symposium on Atomic Scale Characterization and Simulation of Materials and Processes New trends in atomic scale simulation of wet chemical etching of silicon with KOH 

13. Camon 355 1994 Micro System Technologies 94 Simulated data of etching diagram (Si:KOH)