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NTIS 바로가기Thin solid films, v.377/378, 2000년, pp.74 - 80
Takikawa, Hirofumi (Corresponding author. Tel.: +81-532-44-6727) , Kimura, Keisaku (fax: +81-532-44-6757) , Miyano, Ryuichi (Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan) , Sakakibara, Tateki (Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan)
AbstractZinc oxide (ZnO) thin films were prepared on a borosilicate glass substrate by a steered and shielded reactive vacuum arc deposition method. The cathode spot was driven on a cathode surface using weak and strong permanent magnets, placed behind the cathode. The radial magnetic flux densities...
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