다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기
Applied surface science, v.168 no.1/4, 2000년, pp.13 - 16
Kaliwoh, Never (Corresponding author. Tel.: +44-20-7419-3196) , Zhang, Jun-Ying (fax: +44-20-7388-9325) , Boyd, Ian W (Electronic and Electrical Engineering, University College London, Torrington Place, London WC1E 7JE, UK)
AI-Helper
AbstractWe report the growth of thin films of Ta2O5 doped with TiO2 on Si (100) substrates at low temperatures by a new photo-induced sol–gel process. Polymeric sols were formed through hydrolysis and condensation of tantalum ethoxide mixed with titanium isopropoxide. These were then spin-coa...
Nature Streiffer 377 194 1995 10.1038/377194a0
J. Appl. Phys. Fujikawa 75 2538 1994 10.1063/1.356227
Appl. Phys. Lett. Zhang 73 2299 1998 10.1063/1.121803
J. Appl. Phys. Cava 83 1613 1998 10.1063/1.366873
Nature Cava 377 215 1995 10.1038/377215a0
Appl. Phys. Lett. Gan 72 332 1998 10.1063/1.120746
Solid-State Electronics Cappellani 43 1095 1999 10.1016/S0038-1101(99)00031-3
Jpn. J. Appl. Phys. Chang 38 6812 1999 10.1143/JJAP.38.6812
J. Phys. Chem. Solids Meng 58 1503 1997 10.1016/S0022-3697(97)00180-7
Microelectron. Eng. Bergonzo 25 345 1994 10.1016/0167-9317(94)90035-3
P. Bergonzo, Thesis, University College, London, 1994.
Appl. Surf. Sci. Zhang 96-98 399 1996 10.1016/0169-4332(95)00493-9
Surf. Coatings Technol. Kaliwoh 125 424 2000 10.1016/S0257-8972(99)00617-9
Jpn. J. Appl. Phys. Zhang 38 L393 1999 10.1143/JJAP.38.L393
N. Kaliwoh, J.-Y. Zhang, I.W. Boyd, this Conference.
J. Mater. Sci. Lett. Zhang 17 1507 1998 10.1023/A:1026459309199
Thin Solid Films Zhang 336 340 1998 10.1016/S0040-6090(98)01303-0
J. Phys. D - Appl. Phys. Zhang 32 L91 1999 10.1088/0022-3727/32/19/101
Jpn. J. Appl. Phys. Zhang 37 L27 1998 10.1143/JJAP.37.L27
Thin Solid Films Zhang 318 252 1998 10.1016/S0040-6090(97)01171-1
C.J. Brinker, G.W. Scherer, The Physics and Chemistry of Sol-Gel Processing, Academic Press, London, 1990.
SPIE Uhlmann 1328 270 1990 10.1117/12.22567
Ceram. Bull. Yi 70 1173 1991
L.E. Scriven, Better ceramics through chemistry III, in: C.J. Brinker, D.E. Clark, D.R. Ulrich (Eds.), Material Research Society, Pittsburg, PA, USA, 1988, pp. 717-729.
R.W. Jones, Fundamental Principles of Sol-Gel Technology, Institute of Materials, UK, 1989.
J.D. Mackenzie, Ultrastructure processing of glasses, ceramics, and composites, in: L.L. Hench, D.R. Ulrich (Eds.), Vol. 15, Wiley, New York, 1984.
Solar Energy Mater. and Solar Cells Tepehan 59 265 1999 10.1016/S0927-0248(99)00041-0
J. Appl. Phys. Chaneliere 83 4823 1998 10.1063/1.367277
Jpn. J. Appl. Phys. Fukuda 38 6034 1999 10.1143/JJAP.38.6034
G.W. Scherer, in: Proceedings of the Winter School of Glasses and Ceramics from Gels, Sol-Gel Science and Technology, Sao Paulo, Brazil, 1989, p. 153.
해당 논문의 주제분야에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
Copyright KISTI. All Rights Reserved.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.