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NTIS 바로가기Applied surface science, v.168 no.1/4, 2000년, pp.13 - 16
Kaliwoh, Never (Corresponding author. Tel.: +44-20-7419-3196) , Zhang, Jun-Ying (fax: +44-20-7388-9325) , Boyd, Ian W (Electronic and Electrical Engineering, University College London, Torrington Place, London WC1E 7JE, UK)
AbstractWe report the growth of thin films of Ta2O5 doped with TiO2 on Si (100) substrates at low temperatures by a new photo-induced sol–gel process. Polymeric sols were formed through hydrolysis and condensation of tantalum ethoxide mixed with titanium isopropoxide. These were then spin-coa...
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