참고문헌 (43)

1. Science BR Lawn 263 5150 1114 1994 10.1126/science.263.5150.1114 Lawn BR, Padture NP, Cait H, Guiberteau F (1994) Making ceramics “ductile”. Science 263(5150):1114-1116 

   상세보기

2. 10.1117/12.453653 Casstevens JM et al (2001) Silicon carbide high performance optics: a cost-effective, flexible fabrication process. In: International Symposium on Optical Science and Technology. International Society for Optics and Photonics 

   

3. 10.1117/12.617406 Robichaud J et al (2005) Recent advances in reaction bonded silicon carbide optics and optical systems. In: Optics & Photonics 2005. International Society for Optics and Photonics 

   

4. Int J Mach Tools Manuf A Beaucamp 115 29 2017 10.1016/j.ijmachtools.2016.11.006 Beaucamp A et al (2017) Brittle-ductile transition in shape adaptive grinding (SAG) of SiC aspheric optics. Int J Mach Tools Manuf 115:29-37 

   상세보기

5. 10.1007/s40684-019-00103-7 Yan G, You K, Fang F (2019) Three-Linear-Axis Grinding of Small Aperture Aspheric Surfaces. Int J Precis Eng Manuf Green Technol:1-12 

   상세보기

6. Trans Opt Soc L Rayleigh 19 1 38 1917 10.1088/1475-4878/19/1/302 Rayleigh L (1917) Polish. Trans Opt Soc 19(1):38 

   상세보기

7. J Soc Glass Technol F Preston 11 214 1927 Preston F (1927) The theory and design of plate glass polishing machines. J Soc Glass Technol 11:214 

8. J Mater Process Technol HY Tam 192 276 2007 10.1016/j.jmatprotec.2007.04.091 Tam HY, Cheng H, Wang Y (2007) Removal rate and surface roughness in the lapping and polishing of RB-SiC optical components. J Mater Process Technol 192:276-280 

   상세보기

9. Adv Manuf Technol H Cheng XXII 65 2008 Cheng H et al (2008) Mechanisms for grinding and polishing of silicon carbide with loose abrasive sub-aperture tools. Adv Manuf Technol XXII:65 

10. CIRP Ann Manuf Technol F Klocke 58 1 491 2009 10.1016/j.cirp.2009.03.120 Klocke F, Zunke R (2009) Removal mechanisms in polishing of silicon based advanced ceramics. CIRP Ann Manuf Technol 58(1):491-494 

    상세보기

11. Int J Adv Manuf Technol M Tsai 80 9-12 1511 2015 10.1007/s00170-015-7023-4 Tsai M et al (2015) Investigation of increased removal rate during polishing of single-crystal silicon carbide. Int J Adv Manuf Technol 80(9-12):1511-1520 

    상세보기

12. Appl Sci J-K Ho 6 3 89 2016 10.3390/app6030089 Ho J-K et al (2016) Investigation of polishing pads impregnated with Fe and Al2O3 particles for single-crystal silicon carbide wafers. Appl Sci 6(3):89 

    상세보기

13. J Mater Sci Technol G Liu 26 2 125 2010 10.1016/S1005-0302(10)60020-5 Liu G et al (2010) Removal behaviors of different SiC ceramics during polishing. J Mater Sci Technol 26(2):125-130 

    상세보기

14. ECS J Solid State Sci Technol A Kubota 4 12 P468 2015 10.1149/2.0271512jss Kubota A et al (2015) Abrasive-free polishing of single-crystal 4H-SiC with silica glass plates. ECS J Solid State Sci Technol 4(12):P468-P475 

    상세보기

15. 10.4028/www.scientific.net/KEM.625.437 Li ZL et al (2015) A study of computer controlled ultra-precision polishing of silicon carbide reflecting lenses for enhancing surface roughness. In: Key Engineering Materials. Trans Tech Publ 

    상세보기

16. Adv Mech Eng Y Gu 9 11 168781401772909 2017 10.1177/1687814017729090 Gu Y et al (2017) Investigation of silicon carbide ceramic polishing by simulation and experiment. Adv Mech Eng 9(11):1687814017729090 

    상세보기

17. CIRP Ann Manuf Technol B Lauwers 63 2 561 2014 10.1016/j.cirp.2014.05.003 Lauwers B et al (2014) Hybrid processes in manufacturing. CIRP Ann Manuf Technol 63(2):561-583 

    상세보기

18. Kozak J, Rajurkar KP (2000) Hybrid machining process evaluation and development. In: Proceedings of 2nd international conference on machining and measurements of sculptured surfaces, Keynote Paper, Krakow 

19. Int J Mach Tools Manuf S Sun 50 8 663 2010 10.1016/j.ijmachtools.2010.04.008 Sun S, Brandt M, Dargusch M (2010) Thermally enhanced machining of hard-to-machine materials-a review. Int J Mach Tools Manuf 50(8):663-680 

    상세보기

20. Phys Procedia C Brecher 12 599 2011 10.1016/j.phpro.2011.03.076 Brecher C et al (2011) Laser-assisted milling of advanced materials. Phys Procedia 12:599-606 

    상세보기

21. Int J Heat Mass Transf D-H Kim 71 264 2014 10.1016/j.ijheatmasstransfer.2013.12.021 Kim D-H, Lee C-M (2014) A study of cutting force and preheating-temperature prediction for laser-assisted milling of Inconel 718 and AISI 1045 steel. Int J Heat Mass Transf 71:264-274 

    상세보기

22. J Mater Process Technol N Kobayashi 201 1-3 531 2008 10.1016/j.jmatprotec.2007.11.220 Kobayashi N et al (2008) Precision treatment of silicon wafer edge utilizing ultrasonically assisted polishing technique. J Mater Process Technol 201(1-3):531-535 

    상세보기

23. Int J Mach Tools Manuf F-J Shiou 48 7-8 721 2008 10.1016/j.ijmachtools.2008.01.001 Shiou F-J, Ciou H-S (2008) Ultra-precision surface finish of the hardened stainless mold steel using vibration-assisted ball polishing process. Int J Mach Tools Manuf 48(7-8):721-732 

    상세보기

24. CIRP Ann Manuf Technol H Suzuki 59 1 347 2010 10.1016/j.cirp.2010.03.117 Suzuki H et al (2010) Ultraprecision finishing of micro-aspheric surface by ultrasonic two-axis vibration assisted polishing. CIRP Ann Manuf Technol 59(1):347-350 

    상세보기

25. 10.4028/www.scientific.net/AMR.797.450 Lin WM et al (2013) Polishing Characteristics of a Low Frequency Vibration Assisted Polishing Method. In: Advanced Materials Research. Trans Tech Publ 

    상세보기

26. Mater Manuf Process H Cheng 20 6 917 2005 10.1081/AMP-200060417 Cheng H et al (2005) Magnetorheological finishing of SiC aspheric mirrors. Mater Manuf Process 20(6):917-931 

    상세보기

27. J Adv Mech Des Syst Manuf H Yamaguchi 3 1 35 2009 10.1299/jamdsm.3.35 Yamaguchi H et al (2009) Study of finishing of wafers by magnetic field-assisted finishing. J Adv Mech Des Syst Manuf 3(1):35-46 

    상세보기

28. CIRP Ann Manuf Technol K Yamamura 60 1 571 2011 10.1016/j.cirp.2011.03.072 Yamamura K et al (2011) Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface. CIRP Ann Manuf Technol 60(1):571-574 

    상세보기

29. Proc JSPE Semest Meet N Takahashi 2017S 519 2017 Takahashi N et al (2017) Study on laser assisted polishing of SiC. Proc JSPE Semest Meet 2017S:519-520 

30. Mater Sci Eng A X Yang 707 159 2017 10.1016/j.msea.2017.09.043 Yang X et al (2017) Effects of artificial defect on the material residual strength of SiC ceramics after thermal-shock. Mater Sci Eng A 707:159-163 

    상세보기

31. J Eur Ceram Soc P Shukla 37 9 3027 2017 10.1016/j.jeurceramsoc.2017.03.005 Shukla P et al (2017) Surface property modifications of silicon carbide ceramic following laser shock peening. J Eur Ceram Soc 37(9):3027-3038 

    상세보기

32. ECS J Solid State Sci Technol C Wang 6 4 P105 2017 10.1149/2.0041704jss Wang C et al (2017) The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP). ECS J Solid State Sci Technol 6(4):P105-P112 

    상세보기

33. 10.1007/s00170-018-1743-1 Zhang X et al (2018) Study on the grinding behavior of laser-structured grinding in silicon nitride ceramic. Int J Adv Manuf Technol:1-11 

    상세보기

34. Dahotre NB, Harimkar S (2008) Laser fabrication and machining of materials. Springer Science & Business Media 

35. CIRP J Manuf Sci Technol A Stournaras 2 1 61 2009 10.1016/j.cirpj.2009.08.005 Stournaras A et al (2009) An investigation of quality in CO2 laser cutting of aluminum. CIRP J Manuf Sci Technol 2(1):61-69 

    상세보기

36. G Chryssolouris 1 2013 Handbook of manufacturing engineering and technology Process of laser machining Chryssolouris G, Stavropoulos P, Salonitis K (2013) Process of laser machining, Handbook of manufacturing engineering and technology, pp 1-25 

37. Int J Nanomanuf P Stavropoulos 1 6 736 2007 10.1504/IJNM.2007.017992 Stavropoulos P, Chryssolouris G (2007) Molecular dynamics simulations of laser ablation: the Morse potential function approach. Int J Nanomanuf 1(6):736-750 

    

38. Int J Nanomanuf P Stavropoulos 6 1-4 55 2010 10.1504/IJNM.2010.034772 Stavropoulos P et al (2010) Experimental and theoretical investigation of the ablation mechanisms during femptosecond laser machining. Int J Nanomanuf 6(1-4):55-65 

    

39. Int J Mach Tools Manuf S Agarwal 48 6 698 2008 10.1016/j.ijmachtools.2007.10.013 Agarwal S, Rao PV (2008) Experimental investigation of surface/subsurface damage formation and material removal mechanisms in SiC grinding. Int J Mach Tools Manuf 48(6):698-710 

    상세보기

40. J Non-Cryst Solids T Suratwala 352 52-54 5601 2006 10.1016/j.jnoncrysol.2006.09.012 Suratwala T et al (2006) Sub-surface mechanical damage distributions during grinding of fused silica. J Non-Cryst Solids 352(52-54):5601-5617 

    상세보기

41. Proc R Soc Lond A WH Bragg 88 605 428 1913 10.1098/rspa.1913.0040 Bragg WH, Bragg WL (1913) The reflection of X-rays by crystals. Proc R Soc Lond A 88(605):428-438 

    상세보기

42. Mater Manuf Process M Islam 8 6 611 1993 10.1080/10426919308934870 Islam M, Campbell G (1993) Laser machining of ceramics: a review. Mater Manuf Process 8(6):611-630 

    상세보기

43. 10.1115/92-GT-384 Uchimura H, Kokaji A, Kaji M (1992) Evaluation of fast fracture strength of ceramic components under multiaxial stress states. In: ASME 1992 International Gas Turbine and Aeroengine Congress and Exposition. American Society of Mechanical Engineers. 

    

활용도 Top5 논문

더보기

해당 논문의 주제분야에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.