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NTIS 바로가기Journal of vacuum science & technology. A, Vacuum, surfaces, and films, v.38 no.2, 2020년, pp.022418 -
Kim, Sun Jung (School of Chemical Engineering, Sungkyunkwan University (SKKU) 1 , Suwon 16419, South Korea) , Yong, Sang Heon (School of Chemical Engineering, Sungkyunkwan University (SKKU) 1 , Suwon 16419, South Korea) , Choi, You Jin (School of Chemical Engineering, Sungkyunkwan University (SKKU) 1 , Suwon 16419, South Korea) , Hwangbo, Hyeok (School of Chemical Engineering, Sungkyunkwan University (SKKU) 1 , Suwon 16419, South Korea) , Yang, Woo-Young (Samsung Advanced Institute of Technology 2 , 130, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do 16678, South Korea) , Chae, Heeyeop (School of Chemical Engineering, Sungkyunkwan University (SKKU) 1 , Suwon 16419, South Korea)
Al2O3/plasma polymer multilayers were developed and characterized for the moisture barrier films of flexible organic devices. The inorganic Al2O3 thin films were deposited by a spatial atomic layer deposition process and the organic layers were deposited by plasma polymerization in the same chamber ...
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