초록

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Abstract ▼ AI-Helper

Titanium coating is widely used in various industries due to its high-strength as well as thermal and chemical stability. Post-annealing of titanium coating leads to specific surface characteristics or enhanced mechanical properties. Microstructure characteristics such as grain size, density, morpho...

Titanium coating is widely used in various industries due to its high-strength as well as thermal and chemical stability. Post-annealing of titanium coating leads to specific surface characteristics or enhanced mechanical properties. Microstructure characteristics such as grain size, density, morphology, and crystal structure of the coating layer can be changed by post-annealing conditions. These variations affect the structural and functional properties of titanium coating. In this study, titanium coatings measuring 1 ㎛ in thickness were deposited on a silicon wafer via direct current (DC) magnetron sputtering and the coatings were conducted via post-annealing at different temperatures ranging from 350 ℃ to 800 ℃. The fabricated specimens were analyzed using scanning electron microscopy, atomic force microscopy, and X-ray diffraction. The mechanical properties were measured via nano-indentation and scanning acoustic microscopy. The mechanical properties of the titanium coatings fabricated at different post-annealing temperatures were evaluated by analyzing the relationships between microstructure and mechanical properties.

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