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NTIS 바로가기Japanese journal of applied physics, v.52 no.5R, 2013년, pp.056601 -
Hur, Don , Lee, Jeong Hoon
A sensor for determining liquid density and viscosity using a self-actuating microcantilever is proposed. A microcantilever incorporating piezoelectric thin films with seven multilayers was fabricated in order to acquire a direct electrical signal. As proof of the operating principle and sensitivit...
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