[논문]Simplified Modeling of Charged Gas Particles Coupled With EM Field Using Monte Carlo and Finite Volume Methods

Kim, Jihun; Sohn, Ilyoup

doi:10.1109/tps.2020.2979469

[해외논문] Simplified Modeling of Charged Gas Particles Coupled With EM Field Using Monte Carlo and Finite Volume Methods

IEEE transactions on plasma science, v.48 no.4 pt.2, 2020년, pp.921 - 929

Kim, Jihun (KyungWon Tech, Seongnam, South Korea) , Sohn, Ilyoup (Korea Institute of Science and Technology Information, University of Science and Technology, Daejeon, South Korea)

Abstract ▼ AI-Helper

A simplified numerical model to simulate plasma occurring in a magnetron sputtering device is presented. Motions and collisions of charged gas particles are modeled by the direct simulation Monte Carlo (DSMC) method on an adaptive Cartesian mesh structure. An electromagnetic (EM) field equation is solved by the finite volume method, a discretization method. The potential of the EM field influences the charged gas particles calculated by DSMC through a simplified form of non-Sibson interpolation scheme developed in this article. The DSMC, EM field solver, and interpolation module are validated separately, and integrated calculations are applied to a test scenario in a magnetron sputtering experiment. Although simulation is performed without plasma calculation, the erosion rates obtained from the simulation agreed well with experimental data, with less than 10% difference. The proposed model is expected to be used in real plasma applications, especially for calculations of erosion and deposition rates without rigorous plasma calculation.

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DOI : 10.1109/TPS.2020.2979469
IEEE : 저널 > 논문

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