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[해외논문] Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process

IEEE transactions on industry applications, v.56 no.6, 2020년, pp.7012 - 7019  

Sung, Jin-Ho (Korea Institute of Machinery and Materials, Dae-jeon, South Korea) ,  Kim, Sumin (Korea Institute of Machinery and Materials, Dae-jeon, South Korea) ,  Kim, San (Korea Institute of Machinery and Materials, Dae-jeon, South Korea) ,  Han, Bangwoo (Korea Institute of Machinery and Materials, Dae-jeon, South Korea) ,  Kim, Yong-Jin (Korea Institute of Machinery and Materials, Dae-jeon, South Korea) ,  Kim, Hak-Joon (Korea Institute of Machinery and Materials, Dae-jeon, South Korea)

Abstract AI-Helper 아이콘AI-Helper

An integrated electrostatic precipitator (ESP) and wet scrubber system were developed to control nitrogen oxides (NOx) and particulate matter (PM) emissions from a semiconductor manufacturing process. The integrated system consisted of a NO oxidizer, wet scrubber, and ESP. In the NO oxidizer, NO gas...

참고문헌 (27)

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