[논문]Integration of Gold Nanoparticle-Carbon Nanotube Composite for Enhanced Contact Lifetime of Microelectromechanical Switches with Very Low Contact Resistance

Jo, Eunhwan; Lee, Yong-Bok; Jung, Yohan; Kim, Su-Bon; Kang, Yunsung; Seo, Min-Ho; Yoon, Jun-Bo; Kim, Jongbaeg

doi:10.1021/acsami.0c22084

[해외논문] Integration of Gold Nanoparticle-Carbon Nanotube Composite for Enhanced Contact Lifetime of Microelectromechanical Switches with Very Low Contact Resistance

ACS applied materials & interfaces, v.13 no.14, 2021년, pp.16959 - 16967

Jo, Eunhwan (School of Mechanical Engineering , Yonsei University , 50 Yonsei-ro , Seodaemun-gu, Seoul 03722 , Republic of Korea) , Lee, Yong-Bok (School of Electrical Engineering , Korea Advanced Institute of Science Technology (KAIST) , 291 Daehak-ro , Yuseong-gu, Daejeon 34141 , Republic of Korea) , Jung, Yohan (School of Mechanical Engineering , Yonsei University , 50 Yonsei-ro , Seodaemun-gu, Seoul 03722 , Republic of Korea) , Kim, Su-Bon (School of Electrical Engineering , Korea Advanced Institute of Science Technology (KAIST) , 291 Daehak-ro , Yuseong-gu, Daejeon 34141 , Republic of Korea) , Kang, Yunsung (School of Mechanical Engineering , Yonsei University , 50 Yonsei-ro , Seodaemun-gu, Seoul 03722 , Republic of Korea) , Seo, Min-Ho (School of Biomedical Convergence Engineering, College of Information & Biomedical Engineering , Pusan National University , 49 Busandaehak-ro ,) , Yoon, Jun-Bo , Kim, Jongbaeg

Abstract ▼ AI-Helper

Electrical circuits require ideal switches with low power consumption for future electronic applications. However, transistors, the most developed electrical switches available currently, have certain fundamental limitations such as increased leakage current and limited subthreshold swing. To overcome these limitations, micromechanical switches have been extensively studied; however, it is challenging to develop micromechanical switches with high endurance and low contact resistance. This study demonstrates highly reliable microelectromechanical switches using nanocomposites. Nanocomposites consisting of gold nanoparticles (Au NPs) and carbon nanotubes (CNTs) are coated on contact electrodes as contact surfaces through a scalable and solution-based fabrication process. While deformable CNTs in the nanocomposite increase the effective contact area under mechanical loads, highly conductive Au NPs provide current paths with low contact resistance between CNTs. Given these advantages, the switches exhibit robust switching operations over 5 × 106 cycles under hot-switching conditions in air. The switches also show low contact resistance without subthreshold region, an extremely small leakage current, and a high on/off ratio.[FIG OMISSION]

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