[논문]Extreme-Pressure Imprint Lithography for Heat and Ultraviolet-Free Direct Patterning of Rigid Nanoscale Features

Park, Woon Ik; Park, Tae Wan; Choi, Young Joong; Lee, Sangryun; Ryu, Seunghwa; Liang, Xiaogan; Jung, Yeon Sik

doi:10.1021/acsnano.1c02896

[해외논문] Extreme-Pressure Imprint Lithography for Heat and Ultraviolet-Free Direct Patterning of Rigid Nanoscale Features

ACS nano, v.15 no.6, 2021년, pp.10464 - 10471

Park, Woon Ik (Electronic Convergence Materials Division , Korea Institute of Ceramic Engineering & Technology (KICET) , 101 Soho-ro , Jinju 52851 , Republic of Korea) , Park, Tae Wan (Electronic Convergence Materials Division , Korea Institute of Ceramic Engineering & Technology (KICET) , 101 Soho-ro , Jinju 52851 , Republic of Korea) , Choi, Young Joong (Department of Mechanical Engineering , Korea Advanced Institute of Science and Technology (KAIST) , 291 Daehak-ro, Yuseong-gu , Daejeon 34141 , Republic of Korea) , Lee, Sangryun (Department of Mechanical Engineering , Korea Advanced Institute of Science and Technology (KAIST) , 291 Daehak-ro, Yuseong-gu , Daejeon 34141 , Republic of Korea) , Ryu, Seunghwa (Department of Mechanical Engineering , University of Michigan , Ann Arbor , Michigan 48109 , United States) , Liang, Xiaogan (Department of Materials Science and Engineering , Korea Advanced Inst) , Jung, Yeon Sik

Abstract ▼ AI-Helper

Nanoimprint lithography (NIL) is typically performed by filling up of molds by heated polymers or UV-curable liquid resists, inevitably requiring subsequent pattern-transfer processes. Although direct NIL techniques have been suggested alternatively, they usually require precursors or ink-type resists containing undesired organic components. Here, we demonstrate extreme-pressure imprint lithography (EPIL) that effectively produces well-defined multiscale structures with a wide range from 10 nm to 10 mm on diverse surfaces even including pure or alloy metals without using any precursors, heating, UV exposure, or pattern transfer. In particular, EPIL is accomplished through precise control of room-temperature plastic deformation in nanoscale volumes, which is elucidated by finite element analyses and molecular dynamics simulations. In addition to scalability to macroscopic areas, we confirm the outstanding versatility of EPIL via its successful applications to Ni, Cu, steel, and organics. We expect that the state-of-the-art EPIL process combined with other emerging nanopatterning technologies will be extendable to the future large-area nanofabrication of various devices.[FIG OMISSION]

Keyword

참고문헌 (46)

Chou, Stephen Y., Krauss, Peter R., Renstrom, Preston J.. Imprint Lithography with 25-Nanometer Resolution. Science, vol.272, no.5258, 85-87.

상세보기
Xia, Younan, Whitesides, George M.. SOFT LITHOGRAPHY. Annual review of materials science, vol.28, no.28, 153-184.

상세보기
Park, Tae Wan, Byun, Myunghwan, Jung, Hyunsung, Lee, Gyu Rac, Park, Jae Hong, Jang, Hyun-Ik, Lee, Jung Woo, Kwon, Se Hun, Hong, Seungbum, Lee, Jong-Heun, Jung, Yeon Sik, Kim, Kwang Ho, Park, Woon Ik. Thermally assisted nanotransfer printing with sub–20-nm resolution and 8-inch wafer scalability. Science advances, vol.6, no.31, eabb6462-.

상세보기
Choi, Moon Kee, Yang, Jiwoong, Kang, Kwanghun, Kim, Dong Chan, Choi, Changsoon, Park, Chaneui, Kim, Seok Joo, Chae, Sue In, Kim, Tae-Ho, Kim, Ji Hoon, Hyeon, Taeghwan, Kim, Dae-Hyeong. Wearable red–green–blue quantum dot light-emitting diode array using high-resolution intaglio transfer printing. Nature communications, vol.6, 7149-.

상세보기
Turchanin, Andrey, Schnietz, Mark, El-Desawy, Mohamed, Solak, Harun H., David, Christian, Gölzhäuser, Armin. Fabrication of Molecular Nanotemplates in Self-Assembled Monolayers by Extreme-Ultraviolet-Induced Chemical Lithography. Small, vol.3, no.12, 2114-2119.

상세보기
Jung, Hyunsung, Shin, Won Ho, Park, Tae Wan, Choi, Young Joong, Yoon, Young Joon, Park, Sung Heum, Lim, Jae-Hong, Kwon, Jung-Dae, Lee, Jung Woo, Kwon, Se-Hun, Seong, Gi Hun, Kim, Kwang Ho, Park, Woon Ik. Hierarchical multi-level block copolymer patterns by multiple self-assembly. Nanoscale, vol.11, no.17, 8433-8441.

상세보기
Hur, Yoon Hyung, Song, Seung Won, Kim, Jong Min, Park, Woon Ik, Kim, Kwang Ho, Kim, YongJoo, Jung, Yeon Sik. Thermodynamic and Kinetic Tuning of Block Copolymer Based on Random Copolymerization for High‐Quality Sub‐6 nm Pattern Formation. Advanced functional materials, vol.28, no.28, 1800765-.

상세보기
Park, Woon Ik, Kim, Jong Min, Jeong, Jae Won, Jung, Yeon Sik. Deep-Nanoscale Pattern Engineering by Immersion-Induced Self-Assembly. ACS nano, vol.8, no.10, 10009-10018.

상세보기
Lee, S. W., Oh, B.-K., Sanedrin, R. G., Salaita, K., Fujigaya, T., Mirkin, C. A.. Biologically Active Protein Nanoarrays Generated Using Parallel Dip-Pen Nanolithography. Advanced materials, vol.18, no.9, 1133-1136.

상세보기
Lee, Ki-Bum, Park, So-Jung, Mirkin, Chad A., Smith, Jennifer C., Mrksich, Milan. Protein Nanoarrays Generated By Dip-Pen Nanolithography. Science, vol.295, no.5560, 1702-1705.

상세보기
Chen, Jianmei, Sun, Yinghui, Zhong, Liubiao, Shao, Weijing, Huang, Jing, Liang, Feng, Cui, Zequn, Liang, Zhiqiang, Jiang, Lin, Chi, Lifeng. Scalable Fabrication of Multiplexed Plasmonic Nanoparticle Structures Based on AFM Lithography. Small, vol.12, no.42, 5818-5825.

상세보기
Kumar, Golden, Tang, Hong X., Schroers, Jan. Nanomoulding with amorphous metals. Nature, vol.457, no.7231, 868-872.

상세보기
Gao, Huang, Hu, Yaowu, Xuan, Yi, Li, Ji, Yang, Yingling, Martinez, Ramses V., Li, Chunyu, Luo, Jian, Qi, Minghao, Cheng, Gary J.. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures. Science, vol.346, no.6215, 1352-1356.

상세보기
Kurnia, W, Yoshino, M. Nano/micro structure fabrication of metal surfaces using the combination of nano plastic forming, coating and roller imprinting processes. Journal of micromechanics and microengineering.: structures, devices, and systems, vol.19, no.12, 125028-.

상세보기
Sreenivasan, S.V.. Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits. Microsystems & nanoengineering, vol.3, 17075-.

상세보기
Menard, E., Meitl, M. A., Sun, Y., Park, J.-U., Shir, D. J.-L., Nam, Y.-S., Jeon, S., Rogers, J. A.. Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems. Chemical reviews, vol.107, no.4, 1117-1160.

상세보기
Guo, L. J.. Nanoimprint Lithography: Methods and Material Requirements. Advanced materials, vol.19, no.4, 495-513.

상세보기
Lister, K. A., Thoms, S., Macintyre, D. S., Wilkinson, C. D. W., Weaver, J. M. R., Casey, B. G.. Direct imprint of sub-10 nm features into metal using diamond and SiC stamps. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.22, no.6, 3257-.

상세보기
Dinachali, Saman Safari, Saifullah, Mohammad S. M., Ganesan, Ramakrishnan, Thian, Eng San, He, Chaobin. A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography. Advanced functional materials, vol.23, no.17, 2201-2211.

상세보기
Ramachandran, S., Tao, L., Lee, T. H., Sant, S., Overzet, L. J., Goeckner, M. J., Kim, M. J., Lee, G. S., Hu, W.. Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.24, no.6, 2993-.

상세보기
Taniguchi, Jun, Tokano, Yuji, Miyamoto, Iwao, Komuro, Masanori, Hiroshima, Hiroshi. Diamond nanoimprint lithography. Nanotechnology, vol.13, no.5, 592-596.

상세보기
Meng, Zhengong, Li, Guijun, Yiu, Sze‐Chun, Zhu, Nianyong, Yu, Zhen‐Qiang, Leung, Chi‐Wah, Manners, Ian, Wong, Wai‐Yeung. Nanoimprint Lithography‐Directed Self‐Assembly of Bimetallic Iron–M (M=Palladium, Platinum) Complexes for Magnetic Patterning. Angewandte Chemie. international edition, vol.59, no.28, 11521-11526.

상세보기
Yang, J. Joshua, Pickett, Matthew D., Li, Xuema, Ohlberg, Douglas A. A., Stewart, Duncan R., Williams, R. Stanley. Memristive switching mechanism for metal/oxide/metal nanodevices. Nature nanotechnology, vol.3, no.7, 429-433.

상세보기
Pourdavoud, Neda, Wang, Si, Mayer, André, Hu, Ting, Chen, Yiwang, Marianovich, André, Kowalsky, Wolfgang, Heiderhoff, Ralf, Scheer, Hella‐Christin, Riedl, Thomas. Photonic Nanostructures Patterned by Thermal Nanoimprint Directly into Organo‐Metal Halide Perovskites. Advanced materials, vol.29, no.12, 1605003-.

상세보기
Borghetti, Julien, Li, Zhiyong, Straznicky, Joseph, Li, Xuema, Ohlberg, Douglas A. A., Wu, Wei, Stewart, Duncan R., Williams, R. Stanley. A hybrid nanomemristor/transistor logic circuit capable of self-programming. Proceedings of the National Academy of Sciences of the United States of America, vol.106, no.6, 1699-1703.

상세보기
Sharstniou, Aliaksandr, Niauzorau, Stanislau, Ferreira, Placid M., Azeredo, Bruno P.. Electrochemical nanoimprinting of silicon. Proceedings of the National Academy of Sciences of the United States of America, vol.116, no.21, 10264-10269.

상세보기
Chou, Stephen Y., Krauss, Peter R., Renstrom, Preston J.. Imprint of sub-25 nm vias and trenches in polymers. Applied physics letters, vol.67, no.21, 3114-3116.

상세보기
Bottein, Thomas, Wood, Thomas, David, Thomas, Claude, Jean Benoît, Favre, Luc, Berbézier, Isabelle, Ronda, Antoine, Abbarchi, Marco, Grosso, David. “Black” Titania Coatings Composed of Sol–Gel Imprinted Mie Resonators Arrays. Advanced functional materials, vol.27, no.2, 1604924-.

상세보기
Gates, Byron D., Xu, Qiaobing, Love, J. Christopher, Wolfe, Daniel B., Whitesides, George M.. UNCONVENTIONAL NANOFABRICATION. Annual review of materials research, vol.34, 339-372.

상세보기
Chou, Stephen Y.. Nanoimprint lithography. Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures, vol.14, no.6, 4129-.

상세보기
Greer, J.R., De Hosson, J.Th.M.. Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect. Progress in materials science, vol.56, no.6, 654-724.

상세보기
Vollertsen, F., Hu, Z., Niehoff, H.Schulze, Theiler, C.. State of the art in micro forming and investigations into micro deep drawing. Journal of materials processing technology, vol.151, no.1, 70-79.

상세보기
Uchic, Michael D., Shade, Paul A., Dimiduk, Dennis M.. Plasticity of Micrometer-Scale Single Crystals in Compression. Annual review of materials research, vol.39, 361-386.

상세보기
Csikor, Ferenc F., Motz, Christian, Weygand, Daniel, Zaiser, Michael, Zapperi, Stefano. Dislocation Avalanches, Strain Bursts, and the Problem of Plastic Forming at the Micrometer Scale. Science, vol.318, no.5848, 251-254.

상세보기
Uchic, Michael D., Dimiduk, Dennis M., Florando, Jeffrey N., Nix, William D.. Sample Dimensions Influence Strength and Crystal Plasticity. Science, vol.305, no.5686, 986-989.

상세보기
Chou, Stephen Y., Keimel, Chris, Gu, Jian. Ultrafast and direct imprint of nanostructures in silicon. Nature, vol.417, no.6891, 835-837.

상세보기
Choi, Jeong-Young, Ko, Young Bae, Kim, Jongsun, Yoon, Gil Sang, Park, Jeongyeon, Heo, Young Moo, La, Moonwoo. Direct Metal to Metal Imprinting for developing 1-step Manufacturing Process of Patterned Metal Surface. Procedia engineering, vol.207, 1022-1026.

상세보기
Kumar, A, Hsu, K H, Jacobs, K E, Ferreira, P M, Fang, N X. Direct metal nano-imprinting using an embossed solid electrolyte stamp. Nanotechnology, vol.22, no.15, 155302-.

상세보기
Prasad, Y.V.R.K., Rao, K.P.. Materials modeling and finite element simulation of isothermal forging of electrolytic copper. Materials & design, vol.32, no.4, 1851-1858.

상세보기
Park, Woon Ik, Yoon, Jong Moon, Park, Moonkyu, Lee, Jinsup, Kim, Sung Kyu, Jeong, Jae Won, Kim, Kyungho, Jeong, Hu Young, Jeon, Seokwoo, No, Kwang Soo, Lee, Jeong Yong, Jung, Yeon Sik. Self-Assembly-InducedFormation of High-Density SiliconOxide Memristor Nanostructures on Graphene and Metal Electrodes. Nano letters : a journal dedicated to nanoscience and nanotechnology, vol.12, no.3, 1235-1240.

상세보기
Park, Woon Ik, Jung, Yun Kyung, Kim, YongJoo, Shin, Weon Ho, Choi, Young Joong, Park, Tae Wan, Shin, Jung Ho, Jeong, Young Hun, Cho, Jeong Ho, Shin, Hyo‐Soon, Kwon, Se‐Hun, Jung, Yeon Sik, Kim, Kwang Ho. Individual Confinement of Block Copolymer Microdomains in Nanoscale Crossbar Templates. Advanced functional materials, vol.29, no.5, 1805795-.

상세보기
ABAQUS Analysis User’s Manual Abaqus F. 2009
Fast Parallel Algorithms for Short-Range Molecular Dynamics Plimpton S. 1995
Mishin, Y., Mehl, M. J., Papaconstantopoulos, D. A., Voter, A. F., Kress, J. D.. Structural stability and lattice defects in copper:Ab initio, tight-binding, and embedded-atom calculations. Physical review. B, Condensed matter and materials physics, vol.63, no.22, 224106-.

상세보기
Tsai, D. H.. The virial theorem and stress calculation in molecular dynamics. The Journal of chemical physics, vol.70, no.3, 1375-1382.

상세보기
Stukowski, Alexander. Visualization and analysis of atomistic simulation data with OVITO–the Open Visualization Tool. Modelling and simulation in materials science and engineering, vol.18, no.1, 015012-.

상세보기

LOADING...

활용도 분석정보

상세보기

다운로드

내보내기

활용도 Top5 논문

해당 논문의 주제분야에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.

표제어: PCR

동의어: Packet Collision Rate

용어 설명 출처 목록 (6)

용어 설명: PCR은 세균 특이성이 있는 primer를 이용하여 적은 수의 세균이 있을지라도 쉽게 검출할 수 있는 유용한 방법이며, 이를 이용하여 구강 내 치면세균막이나 타액에서 직접 세균을 검출할 수 있게 되었다[8].

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 논문명, 저널/프로시딩명, 저자 , 발행년, 권, 호, 시작페이지, 끝페이지, 발행기관 관리번호, 논문명, 대등논문명, 저자 , 저널/프로시딩명, 발행기관, 발행년, 발행언어, 권, 호, 시작페이지, 끝페이지, ISBN, ISSN, 주제분야, 키워드, 초록(한글), 초록(영문), 저자(소속기관)
저장형식	Text(ASCII format) Excel format RefWorks Direct Export RIS format (for Reference Manager, ProCite, EndNote), Scholar's Aids, Mendeley
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증