[논문]Synthesis of Lithography Test Patterns Using Machine Learning Model

Kareem, Pervaiz; Shin, Youngsoo

doi:10.1109/tsm.2021.3052302

[해외논문] Synthesis of Lithography Test Patterns Using Machine Learning Model

IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society,, v.34 no.1, 2021년, pp.49 - 57

Kareem, Pervaiz (KAIST, School of Electrical Engineering, Daejeon, South Korea) , Shin, Youngsoo (KAIST, School of Electrical Engineering, Daejeon, South Korea)

Abstract ▼ AI-Helper

Diversity of test patterns is important for many lithography applications. It is however difficult to achieve with sample layouts or by using a popular pattern generator. We propose a synthesis method of lithography test patterns. Each pattern is represented by a map of IPS (image parameter space) values, called IPS map. A key in the proposed method is to guarantee that the center of the synthesized pattern corresponds to the IPS values given as input. The synthesis consists of three steps: a new IPS map is generated using an adversarial auto-encoder (AAE) with given IPS values; the IPS map is converted to its corresponding layout through an auto-encoder (AE); the layout goes through the final processing to remove any unrealistic shapes. Both AAE and AE are trained beforehand by using a few sample layouts. The synthesis method is applied to lithography modeling. The RMSE of lithography model is reduced by 30% when the model is calibrated with synthesized patterns, compared to the model based on test patterns from a pattern generator. A machine learning-based lithography simulation is taken as a second application. When the synthesized patterns are used to train the machine learning model, the accuracy of lithography simulation improves by 7%.

참고문헌 (24)

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DOI : 10.1109/TSM.2021.3052302
IEEE : 저널 > 논문

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용어 설명: PCR은 세균 특이성이 있는 primer를 이용하여 적은 수의 세균이 있을지라도 쉽게 검출할 수 있는 유용한 방법이며, 이를 이용하여 구강 내 치면세균막이나 타액에서 직접 세균을 검출할 수 있게 되었다[8].

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