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[해외논문] Fast Flexible Bottom‐Gated Hydrogen Sensor Based on Silicon Nanomembrane

Advanced materials technologies, v.6 no.5, 2021년, pp.2000847 -   

Cho, Minkyu (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Republic of Korea) ,  Cho, Incheol (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Republic of Korea) ,  Kim, Kyuyoung (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Republic of Korea) ,  Park, Inkyu (Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Republic of Korea)

Abstract AI-Helper 아이콘AI-Helper

AbstractHigh performance flexible hydrogen sensor using a silicon nanomembrane (Si NM) coated with palladium nanoparticles (Pd NPs) is developed. After the formation of gate structure on a released Si NM, selectively pre‐doped Si NM is flip‐transferred onto a plastic substrate. Along w...

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