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NTIS 바로가기Sensors and actuators. B, Chemical, v.83 no.1/3, 2002년, pp.216 - 221
Matsunaga, Naoki (Department of Molecular and Material Sciences, Graduate School of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan) , Sakai, Go (Faculty of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan) , Shimanoe, Kengo (Faculty of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan) , Yamazoe, Noboru (Faculty of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan)
Abstract A diffusion–reaction equation has been formulated and solved under non-steady condition in order to simulate how the gas concentration profile develops inside a thin film of semiconducting oxide after its exposure to a target gas. The gas concentration can be expressed by a polynomia...
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