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Sensor-based microassembly of hybrid MEMS devices

IEEE control systems, v.18 no.6, 1998년, pp.35 - 45  

Nelson, B. (Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA) ,  Yu Zhou ,  Vikramaditya, B.

Abstract AI-Helper 아이콘AI-Helper

The technology barrier that micromanipulation presents to many emerging fields requires that control and assembly issues in ultra-high precision motion control be addressed. In this article, we first discuss the important differences that exist between microassembly and traditional automatic assembl...

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