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Microelectronic engineering, v.66 no.1/4, 2003년, pp.779 - 784
Cong, Peng (Institute of Microelectronics, Tisnghua University, Beijing 100084, China) , Ren, Tian-Ling (Corresponding author.) , Liu, Li-Tian (Institute of Microelectronics, Tisnghua University, Beijing 100084, China)
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AbstractA novel structure of piezoelectric-based RF passband bulk acoustic wave (BAW) filter is fabricated using surface micromachining. The solutions of the wave equation for the electrode–piezoelectrics–electrode sandwich structure on support film in the BAW RF resonators are present...
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