최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기Microelectronic engineering, v.66 no.1/4, 2003년, pp.779 - 784
Cong, Peng (Institute of Microelectronics, Tisnghua University, Beijing 100084, China) , Ren, Tian-Ling (Corresponding author.) , Liu, Li-Tian (Institute of Microelectronics, Tisnghua University, Beijing 100084, China)
AbstractA novel structure of piezoelectric-based RF passband bulk acoustic wave (BAW) filter is fabricated using surface micromachining. The solutions of the wave equation for the electrode–piezoelectrics–electrode sandwich structure on support film in the BAW RF resonators are present...
IEEE Trans. Ultrason. Ferroelectr. Freq. Control Naik Rajan 47 1 292 2000 10.1109/58.818773 Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality
IEEE Trans. Ultrason. Ferroelectr. Freq. Control Naik Rajan 45 1 257 1998 10.1109/58.646930 Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator
Proc. IEEE [C] Gregory 86 8 1536 1998 10.1109/5.704259 Bulk micromachining of silicon
Proc. IEEE [C] James 86 8 1552 1998 10.1109/5.704260 Surface micromachining for microelectromechanical systems
Sensors Actuators A: Physical Kronast 87 3 188 2001 10.1016/S0924-4247(00)00483-0 Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap
J. Micromech. Microeng. Bell 6 4 361 1996 10.1088/0960-1317/6/4/002 Porous silicon as a sacrificial material
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.