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表面科學 = Journal of the Surface Science Society of Japan, v.24 no.4, 2003년, pp.227 - 232
橋本 哲 (鋼管計測 (株))
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International standards of XPS and AES spectrometers have been established. Binding energy scale calibration for XPS spectrometers was standardized as ISO 15472. The calibration of kinetic energy scale for AES spectrometers was standardized as ISO 17973 and 17974. The calibrations for the intensity ...
Hashimoto, Satoshi, Matsuoka, Hideki, Kagechika, Hiroshi, Susa, Masahiro, Goto, Kazuhiro S.. Degradation of Electrochromic Amorphous WO 3 Film in Lithium‐Salt Electrolyte. Journal of the Electrochemical Society : JES, vol.137, no.4, 1300-1304.
2) ISO 15472: “Surface chemical analysis—X-ray photoelectron spectrometers—Calibration of energy scales”.
3) JIS K 0145: “表面化？分析—X線光電子分光？置—エネルギ？軸目盛の校正”.
4) ISO 17973: “Surface chemical analysis—Medium Auger electron spectrometers—Calibration of energy scales for elemental analysis”.
5) ISO 17974: “Surface chemical analysis—High Auger electron spectrometers—Calibration of energy scales for elemental and chemical state analysis”.
10.1002/(SICI)1096-9918(199808)26:9<617::AID-SIA407>3.0.CO;2-V
Seah, M. P., Tosa, M.. Linearity in electron counting and detection systems. Surface and interface analysis : SIA, vol.18, no.3, 240-246.
Cumpson, P. J., Seah, M. P.. Random uncertainties in AES and XPS: I: Uncertainties in peak energies, intensities and areas derived from peak synthesis. Surface and interface analysis : SIA, vol.18, no.5, 345-360.
Powell, C. J.. Energy calibration of x‐ray photoelectron spectrometers: Results of an interlaboratory comparison to evaluate a proposed calibration procedure. Surface and interface analysis : SIA, vol.23, no.3, 121-132.
10.1002/(SICI)1096-9918(199808)26:9<642::AID-SIA408>3.0.CO;2-3
10.1016/S0368-2048(96)03097-6 11) M.P. Seah and I.S. Gilmore: J. Electron Spectrosc. 83, 197 (1997).
Anthony, M. T., Seah, M. P.. XPS: Energy calibration of electron spectrometers. 2—Results of an interlaboratory comparison. Surface and interface analysis : SIA, vol.6, no.3, 107-115.
Seah, M. P.. Measurement: AES and XPS. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, vol.3, no.3, 1330-1337.
10.1016/S0368-2048(98)00299-0 14) M.P. Seah: J. Electron. Spec. 97, 235 (1998).
Seah, M. P., Smith, G. C., Anthony, M. T.. AES: Energy calibration of electron spectrometers. I—an absolute, traceable energy calibration and the provision of atomic reference line energies. Surface and interface analysis : SIA, vol.15, no.5, 293-308.
16) M.P. Seah, I.S. Gilmore and S.J. Spencer: J. Electron. Spec. 104, 73 (1999).
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