최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기IEEE electron device letters : a publication of the IEEE Electron Devices Society, v.27 no.7, 2006년, pp.579 - 581
Kim, Yong-Hae (Basic Res. Lab., Korea Electron. & Telecommun. Res. Inst., Daejeon, South Korea) , Chung, Choong-Heui , Moon, Jaehyun , Kim, Gi Heon , Park, Dong-Jin , Kim, Dae-Won , Lim, Jung Wook , Yun, Sun Jin , Song, Yoon-Ho , Lee, Jin Ho
A novel oxide-silicon-oxide buffer structure to prevent damage to a plastic substrate in an ultralow temperature (<120°C) polycrystalline silicon thin-film transistor (ULTPS TFT) process is presented. Specifically, an amorphous silicon film was inserted as an absorption layer into buffer oxide films. The maximum endurable laser energy was increased from 200 to 800 mJ/cm2. The fabricated ULTPS nMOS TFT showed a performance with mobility of 30 cm2/Vs.
Kim, H. J., Im, James S.. New excimer-laser-crystallization method for producing large-grained and grain boundary-location-controlled Si films for thin film transistors. Applied physics letters, vol.68, no.11, 1513-1515.
Kerrien, G., Hernandez, M., Laviron, C., Sarnet, T., Débarre, D., Noguchi, T., Zahorski, D., Venturini, J., Semeria, M.N., Boulmer, J.. Optical characterization of laser processed ultra-shallow junctions. Applied surface science, vol.208, 277-284.
Chung, Choong-Heui, Ko, Young-Wook, Kim, Yong-Hae, Sohn, Choong-Yong, Chu, Hye Yong, Lee, Jin Ho. Improvement in performance of transparent organic light-emitting diodes with increasing sputtering power in the deposition of indium tin oxide cathode. Applied physics letters, vol.86, no.9, 093504-.
Serikawa, Tadashi, Omata, Fujio. High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions. Japanese journal of applied physics. Part 2, Letters, vol.39, no.5, L393-.
Gosain, Dharam Pal, Noguchi, Takashi, Usui, Setsuo. High Mobility Thin Film Transistors Fabricated on a Plastic Substrate at a Processing Temperature of 110°C. Japanese journal of applied physics. Part 2, Letters, vol.39, no.a3, L179-.
Lemmi, F., Chung, W., Lin, S., Smith, P.M., Sasagawa, T., Drews, B.C., Hua, A., Stern, J.R., Chen, J.Y.. High-performance TFTs fabricated on plastic substrates. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.25, no.7, 486-488.
Carey, Paul G., Smith, Patrick M., Theiss, Steven D., Wickboldt, Paul. Polysilicon thin film transistors fabricated on low temperature plastic substrates. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, vol.17, no.4, 1946-1949.
Kim, Y.-H., Sohn, C.-Y., Lim, J.W., Yun, S.J., Hwang, C.-S., Chung, C.-H., Ko, Y.-W., Lee, J.H.. High-Performance Ultralow-Temperature Polycrystalline Silicon TFT Using Sequential Lateral Solidification. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.25, no.8, 550-552.
KWON, J. Y.. Low Temperature Poly-Si Thin Film Transistor on Plastic Substrates. IEICE transactions on electronics, vol.e88, no.4, 667-671.
Lee, M.J, Judge, C.P, Wright, S.W. Thin film transistors for displays on plastic substrates. Solid-state electronics, vol.44, no.8, 1431-1434.
Kim, Y.H., Chung, C.H., Yun, S.J., Moon, J., Park, D.J., Kim, D.W., Lim, J.W., Song, Y.H., Lee, J.H.. Large-grain polycrystalline silicon film by sequential lateral solidification on a plastic substrate. Thin solid films, vol.493, no.1, 192-196.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.