$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Study of micro-lens array by reflow process

Journal of modern optics, v.55 no.17, 2008년, pp.2843 - 2856  

Pan, C. T. (Department of Mechanical and Electro-Mechanical Engineering, and Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Taiwan) ,  Su, C. Y. (Institute of Manufacturing Technology, National Taipei University of Technology, Taipei, Taiwan)

Abstract AI-Helper 아이콘AI-Helper

In this study, different diameters of photoresist AZ4620 are defined using lithography. According to the specification of the back light module (BLM) for a liquid crystal display (LCD), the diameters of micro-lenses are divided into two groups. The first group includes lenses with diameters of 90, ...

주제어

참고문헌 (31)

  1. Informat. Dis. Ezell B 42 5 2001 

  2. Ho, J.R., Shih, T.K., Cheng, J.W.J., Sung, C.K., Chen, C.F.. A novel method for fabrication of self-aligned double microlens arrays. Sensors and actuators. A, Physical, vol.135, no.2, 465-471.

  3. Yang, C.C., Huang, Y.H., Peng, T.C., Wu, M.C., Ho, C.L., Hong, C.C., Liu, I.M., Tsai, Y.T.. Fabrication of a vertical reflow microlens with silylation technology. Sensors and actuators. A, Physical, vol.136, no.1, 398-402.

  4. Popovic, Zoran D., Sprague, Robert A., Neville Connell, G. A.. Technique for monolithic fabrication of microlens arrays. Applied optics, vol.27, no.7, 1281-.

  5. Hutley, M. C.. Optical Techniques for the Generation of Microlens Arrays. Journal of modern optics, vol.37, no.2, 253-265.

  6. J. Vac. Sci. Technol. B Choi JO 3633 6 1988 

  7. Borrelli, Nicholas F., Morse, David L., Bellman, Robert H., Morgan, Walter L.. Photolytic technique for producing microlenses in photosensitive glass. Applied optics, vol.24, no.16, 2520-.

  8. Yang, Hsiharng, Chao, Ching-Kong, Wei, Mau-Kuo, Lin, Che-Ping. High fill-factor microlens array mold insert fabrication using a thermal reflow process. Journal of micromechanics and microengineering.: structures, devices, and systems, vol.14, no.8, 1197-1204.

  9. Lin, Che-Ping, Yang, Hsiharng, Chao, Ching-Kong. Hexagonal microlens array modeling and fabrication using a thermal reflow process. Journal of micromechanics and microengineering.: structures, devices, and systems, vol.13, no.5, 775-781.

  10. Tsou, Chingfu, Lin, Chewei. A New Method for Microlens Fabrication by a Heating Encapsulated Air Process. IEEE photonics technology letters : a publication of the IEEE Laser and Electro-optics Society, vol.18, no.23, 2490-2492.

  11. Chung, C. K., Hong, Y. Z.. Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments. Microsystem technologies : sensors, actuators, systems integration, vol.13, no.5, 523-530.

  12. Zhang, P., Londe, G., Sung, J., Johnson, E., Lee, M., Cho, H. J.. Microlens fabrication using an etched glass master. Microsystem technologies : sensors, actuators, systems integration, vol.13, no.3, 339-342.

  13. 10.1117/12.360143 

  14. Yang, H, Pan, C-T, Chou, M-C. Ultra-fine machining tool/molds by LIGA technology. Journal of micromechanics and microengineering.: structures, devices, and systems, vol.11, no.2, 94-99.

  15. Lee, Sung-Keun. A simple method for microlens fabrication by the modified LIGA process. Journal of micromechanics and microengineering.: structures, devices, and systems, vol.12, no.3, 334-340.

  16. Cox, W.R., Chen, T., Ussery, D., Hayes, D.J., Tatum, J.A., MacFarlane, D.L.. Microjetted lenslet triplet fibers. Optics communications, vol.123, no.4, 492-496.

  17. COX, W.ROYALL, CHEN, TING, HAYES, DONALD J.. Micro-Optics Fabrication by Ink-Jet Printers. Optics and photonics news, vol.12, no.6, 32-.

  18. 10.1117/12.428032 

  19. 10.1117/12.234623 

  20. Chang, C.Y., Yang, S.Y., Chu, M.H.. Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process. Microelectronic engineering, vol.84, no.2, 355-361.

  21. Lee, Y.-C., Wu, C.-Y.. Excimer laser micromachining of aspheric microlenses with precise surface profile control and optimal focusing capability. Optics and lasers in engineering, vol.45, no.1, 116-125.

  22. Akatay, Ata, Urey, Hakan. Design and optimization of microlens array based high resolution beam steering system. Optics express, vol.15, no.8, 4523-.

  23. Audran, S., Faure, B., Mortini, B., Regolini, J., Schlatter, G., Hadziioannou, G.. Study of mechanisms involved in photoresist microlens formation. Microelectronic engineering, vol.83, no.4, 1087-1090.

  24. IMAPS Internat. J. Microcircuits Electron. Packaging Cox WR 89 20 1997 

  25. Chan, E. P., Crosby, A. J.. Fabricating Microlens Arrays by Surface Wrinkling. Advanced materials, vol.18, no.24, 3238-3242.

  26. Yabu, H., Shimomura, M.. Simple Fabrication of Micro Lens Arrays. Langmuir : the ACS journal of surfaces and colloids, vol.21, no.5, 1709-1711.

  27. 10.1002/1521-4095(20021016)14:20<1502::AID-ADMA1502>3.0.CO;2-M 

  28. Meyerhofer, Dietrich. Characteristics of resist films produced by spinning. Journal of applied physics, vol.49, no.7, 3993-3997.

  29. Schubert, D. W.. Spin coating as a method for polymer molecular weight determination. Polymer bulletin, vol.38, no.2, 177-184.

  30. Pannek, Michael, Dunkel, Thomas, Schubert, Dirk W.. Effect of a bell-shaped cover in spin coating process on final film thickness. Materials research innovations, vol.4, no.5, 340-343.

  31. Bornside, David E., Brown, Robert A., Ackmann, Paul W., Frank, John R., Tryba, Anthony A., Geyling, Franz T.. The effects of gas phase convection on mass transfer in spin coating. Journal of applied physics, vol.73, no.2, 585-600.

관련 콘텐츠

저작권 관리 안내
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로