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NTIS 바로가기Journal of micromechanics and microengineering.: structures, devices, and systems, v.21 no.2, 2011년, pp.027001 -
Wang, Binglei , Zhou, Shenjie , Zhao, Junfeng , Chen, Xi
We present a size-dependent model for electrostatically actuated microbeam-based MEMS using strain gradient elasticity theory. The normalized pull-in voltage is shown to increase nonlinearly with the decrease of the beam height, and the size effect becomes prominent if the beam thickness is on the o...
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