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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS

Journal of micromechanics and microengineering.: structures, devices, and systems, v.21 no.2, 2011년, pp.027001 -   

Wang, Binglei ,  Zhou, Shenjie ,  Zhao, Junfeng ,  Chen, Xi

Abstract AI-Helper 아이콘AI-Helper

We present a size-dependent model for electrostatically actuated microbeam-based MEMS using strain gradient elasticity theory. The normalized pull-in voltage is shown to increase nonlinearly with the decrease of the beam height, and the size effect becomes prominent if the beam thickness is on the o...

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