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NTIS 바로가기Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, v.20 no.1, 2011년, pp.204 - 212
Yong-Ha Song (Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea) , Dong-Hoon Choi (Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea) , Hyun-Ho Yang (Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea) , Jun-Bo Yoon (Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea)
This paper presents an electrostatically actuated microelectromechanical systems (MEMS) relay with a stacked-electrode structure having meshed drain electrode and a soft dielectric layer under the contact material to achieve high contact force and low hardness simultaneously, with the aim of providi...
A Surface Micromachined Accelerometer With Integrated CMOS Detection Circuitry yun 1992
Chow, Linda L. W., Schrader, Steven A., Kurabayashi, Katsuo. Transition from multiple to single microcontact conduction during hot switching of microelectromechanical switches with ball-shaped dimples. Applied physics letters, vol.89, no.13, 133501-.
Wexler, G. The size effect and the non-local Boltzmann transport equation in orifice and disk geometry. Proceedings of the Physical Society, vol.89, no.4, 927-941.
10.1002/1521-3900(200103)167:1<213::AID-MASY213>3.0.CO;2-D
Kwon, Hyouk, Jang, Seong-Soo, Park, Yong-Hee, Kim, Tae-Sik, Kim, Yong-Dae, Nam, Hyo-Jin, Joo, Young-Chang. Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches. Journal of micromechanics and microengineering.: structures, devices, and systems, vol.18, no.10, 105010-.
Hiltmann, K., Schumacher, A., Guttmann, K., Lemp, E., Sandmaier, H., Lang, W.. New micromachined membrane switches in silicon technology. IEEE transactions on components and packaging technologies : a publication of the IEEE Components, Packaging, and Manufacturing Technology Society, vol.25, no.3, 397-401.
Sens Actuators A Phys micromachined switches for low electric loads hiltmann 1999 10.1016/S0924-4247(98)00317-3 74 203
Electrostatic radio frequency (RF) micro-electromechnical systems (MEMS) switches with metal alloy electric contacts coutu 2004
Proc 36th IEEE Holm Conf Elect Contacts Contact metals for reed switches jahn 1990 53
Feixiang Ke, Jianmin Miao, Oberhammer, J.. A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.17, no.6, 1447-1459.
Novel RF MEMS switch and packaging concepts oberhammer 2004
Saha, Ranjana, Nix, William D.. Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta materialia, vol.50, no.1, 23-38.
An electrothermal actuated bistable MEMS relay for power application qiu 2003
Umemoto, T., Takeuchi, T., Tanaka, R.. The Behavior of Surface Oxide Film on Ruthenium and Rhodium Plated Contacts. IEEE transactions on components, hybrids, and manufacturing technology, vol.1, no.1, 103-107.
Petersen, K. E.. Micromechanical Membrane Switches on Silicon. IBM journal of research and development, vol.23, no.4, 376-385.
Oberhammer, J., Stemme, G.. Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.13, no.3, 421-428.
Pruitt, B.L., Park, Woo-Tae, Kenny, T.W.. Measurement system for low force and small displacement contacts. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.13, no.2, 220-229.
Simon, W., Mack, T., Schauwecker, B., Strohm, K.M., Luy, J.-F.. Toggle switch: investigations of an RF MEMS switch for power applications. IEE proceedings. Microwaves, antennas, and propagation, vol.152, no.5, 378-384.
Lee, Han-Sheng, Leung, C.H., Shi, J., Chang, Shih-Chia, Lorincz, S., Nedelescu, L.. Integrated microrelays: concept and initial results. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.11, no.2, 147-153.
Chow, L.L.W., Volakis, J.L., Saitou, K., Kurabayashi, K.. Lifetime Extension of RF MEMS Direct Contact Switches in Hot Switching Operations by Ball Grid Array Dimple Design. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.28, no.6, 479-481.
Lee, Han-Sheng, Leung, Chi H., Shi, Jenny, Chang, Shih-Chia. Electrostatically actuated copper-blade microrelays. Sensors and actuators. A, Physical, vol.100, no.1, 105-113.
Proc IEEE MEMS an electrostatically-actuated mems switch for power applications wong 2000 633
Qiu, Jin, Lang, J.H., Slocum, A.H., Weber, A.C.. A bulk-micromachined bistable relay with U-shaped thermal actuators. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.14, no.5, 1099-1109.
Taylor, W.P., Brand, O., Allen, M.G.. Fully integrated magnetically actuated micromachined relays. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.7, no.2, 181-191.
Majumder, Sumit, McGruer, N.E., Adams, George G., Zavracky, P.M., Morrison, Richard H., Krim, Jacqueline. Study of contacts in an electrostatically actuated microswitch. Sensors and actuators. A, Physical, vol.93, no.1, 19-26.
Muldavin, J.B., Rebeiz, G.M.. Inline capacitive and DC-contact MEMS shunt switches. IEEE microwave and wireless components letters : a publication of the IEEE Microwave Theory and Techniques Society, vol.11, no.8, 334-336.
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