[논문]Fabrication of polymer-based micro devices: Formulation and study of the paste

Serra, N.; Maeder, T.; Gentsch, O.; Ryser, P.

doi:10.1016/j.sna.2011.03.049

Fabrication of polymer-based micro devices: Formulation and study of the paste 원문보기

Sensors and actuators. A, Physical, v.172 no.1, 2011년, pp.336 - 340

Serra, N. (Laboratoire de Production Microtechnique, Ecole Polytechnique Federale de Lausanne, Station 17, 1015 Lausanne, Switzerland) , Maeder, T. , Gentsch, O. , Ryser, P.

Abstract ▼ AI-Helper

We investigate in the present work the fabrication of polymer-based micro-fluidic and micro-mechanical devices using sacrificial, resistive/conductive pastes, through a screen-printing process. An organic sacrificial paste is first screen-printed onto a substrate, building the future empty space (channels, cavities...) where it lies. Then, a resistive paste based on thermosetting polymer resin and graphite is deposited onto the previous layer. Finally, the sacrificial paste is removed at 150oC by sublimation through the composite, thus yielding the desired pattern. For such applications, the key is naturally the formulation of the pastes. In a previous work, we already proposed a potential formulation for the organic sacrificial paste, based on polyols [1]. In the present paper, we will focus on the formulation of the cover paste, which must be adapted rheologically for the screen-printing process, but also chemically due to strong potential interactions between the sacrificial layer and the over-layer. Finally, micro-devices such as simple fluidic channels and suspended structures were produced and shown to be operational, demonstrating the high potential of our process.

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Fabrication of polymer-based micro devices: Formulation and study of the paste 원문보기

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