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CIRP annals ... manufacturing technology, v.61 no.1, 2012년, pp.359 - 362
Lu, X. , Usman, I.u.r.
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Achieving 6D direct drive motion control over long planar strokes on a single mover can greatly improve machine performance. Existing solutions are either limited to small-stroke applications (a fraction of the stage size) or require a large number of coils with enormous control complexity. This pap...
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