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Optik, v.124 no.22, 2013년, pp.5293 - 5296
Qin, Y. , Zhao, H. , Zhang, L. , Wang, L.
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An optical sensing technology based on optical coherence tomography is presented for film thickness measurement and defect inspection. In order to improve the imaging quality, a simple interference spectrum processing procedure is proposed to eliminate the DC and the autocorrelation noise. With the ...
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