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New journal of physics, v.8 no.4, 2006년, pp.47 - 47
Swindells, I (Department of Electrical Engineering and Electronics, University of Liverpool, Brownlow Hill, Liverpool L69 3GJ, UK) , Kelly, P J (Department of Chemistry and Materials, Manchester Metropolitan University, Chester Street, Manchester M1 5GD, UK) , Bradley, J W (Department of Electrical Engineering and Electronics, University of Liverpool, Brownlow Hill, Liverpool L69 3GJ, UK)
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Using time-resolved optical emission spectroscopy and Langmuir probing, the effect of substrate bias (and the absence of the substrate) on the energetics and concentrations of the plasma species at different phases of the pulse have been investigated in a bi-polar unbalanced pulsed dc magnetron. The...
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