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Sensors and actuators. A, Physical, v.224, 2015년, pp.78 - 86
Sun, X. , Chen, W. , Zhang, J. , Zhou, R. , Chen, W.
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This paper presents a novel piezo-driven linear-rotary inchworm actuator with a large motion range and high resolution. Such an actuator will be indispensable in precision positioning. The proposed actuator consists of four flexure modules driven by four piezoelectric actuators, namely, two clamping...
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