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Applied surface science, v.392, 2017년, pp.826 - 833
Ma, Q. , Li, L. , Xu, Y. , Gu, J. , Wang, L. , Xu, Y.
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TiAlSiN nanocomposite coatings were deposited onto cemented carbide (WC-10wt.%, Co) substrates by high power impulse magnetron sputtering (HiPIMS). The effect of substrate bias voltage on plasma discharge characterization of HiPIMS, element concentration, deposition rate, microstructure, surface/cro...
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