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Anisotropic etching for laser texturing of multicrystalline silicon wafer

Molecular crystals and liquid crystals, v.645 no.1, 2017년, pp.231 - 238  

Ha, Seung Hyun ,  Kim, Ji Hyeon ,  Park, Sang Joon

Abstract AI-Helper 아이콘AI-Helper

For texturing of multicrystalline silicon wafers for solar cells, a HF-free texturing process was proposed by employing alkali cleaning (anisotropic etching) process after laser texturing. KOH/isopropyl alcohol (IPA) was more effective than KOH because the cleaning rate was rather slow but the shape...

참고문헌 (19)

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  2. Abbott, Malcolm, Cotter, Jeffrey. Optical and electrical properties of laser texturing for high-efficiency solar cells. Progress in photovoltaics, vol.14, no.3, 225-235.

  3. Dobrzanski, L.A., Drygala, A., Golombek, K., Panek, P., Bielanska, E., Zieba, P.. Laser surface treatment of multicrystalline silicon for enhancing optical properties. Journal of materials processing technology, vol.201, no.1, 291-296.

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  7. Lee, K.s., Ha, M.H., Kim, J.H., Jeong, J.W.. Damage-free reactive ion etch for high-efficiency large-area multi-crystalline silicon solar cells. Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion, vol.95, no.1, 66-68.

  8. Nakaya, H., Nishida, M., Takeda, Y., Moriuchi, S., Tonegawa, T., Machida, T., Nunoi, T.. Polycrystalline silicon solar cells with V-grooved surface. Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion, vol.34, no.1, 219-225.

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  10. Singh, P.K., Kumar, R., Lal, M., Singh, S.N., Das, B.K.. Effectiveness of anisotropic etching of silicon in aqueous alkaline solutions. Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion, vol.70, no.1, 103-113.

  11. Macdonald, D.H., Cuevas, A., Kerr, M.J., Samundsett, C., Ruby, D., Winderbaum, S., Leo, A.. Texturing industrial multicrystalline silicon solar cells. Solar energy, vol.76, no.1, 277-283.

  12. Zolper, John C., Narayanan, Srinivasamohan, Wenham, Stuart R., Green, Martin A.. 16.7% efficient, laser textured, buried contact polycrystalline silicon solar cell. Applied physics letters, vol.55, no.22, 2363-2365.

  13. Ye, Xiaoya, Zou, Shuai, Chen, Kexun, Li, Jianjiang, Huang, Jie, Cao, Fang, Wang, Xusheng, Zhang, Lingjun, Wang, Xue‐Feng, Shen, Mingrong, Su, Xiaodong. 18.45%‐Efficient Multi‐Crystalline Silicon Solar Cells with Novel Nanoscale Pseudo‐Pyramid Texture. Advanced functional materials, vol.24, no.42, 6708-6716.

  14. Sivasubramaniam, S., Alkaisi, M.M.. Inverted nanopyramid texturing for silicon solar cells using interference lithography. Microelectronic engineering, vol.119, 146-150.

  15. Chu, A.K., Wang, J.S., Tsai, Z.Y., Lee, C.K.. A simple and cost-effective approach for fabricating pyramids on crystalline silicon wafers. Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion, vol.93, no.8, 1276-1280.

  16. Belhadj Mohamed, S., Ben Rabha, M., Bessais, B.. Porous silicon/NaOH texturization surface treatment of crystalline silicon for solar cells. Solar energy, vol.94, 277-282.

  17. Moreno, M., Murias, D., Martinez, J., Reyes-Betanzo, C., Torres, A., Ambrosio, R., Rosales, P., Roca i Cabarrocas, P., Escobar, M.. A comparative study of wet and dry texturing processes of c-Si wafers for the fabrication of solar cells. Solar energy, vol.101, 182-191.

  18. JAMME Dobrzanski L. A. 77 31 2008 

  19. Ha, Seung Hyun, Kim, Ji Hyeon, Lee, Chun Jae, Park, Hun, Park, Sang Joon. HF-Free Laser Texturing of Polycrystalline Silicon Wafer for PV Cells. Science of advanced materials, vol.7, no.12, 2738-2742.

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