[논문]Development and application of chip calorimeter as an X-ray detector

Kim, Jonghyun; Nam, Sung Min; Jang, Heejun; Chung, Jae-Pil; Kim, Jin Sung; Kim, Byoung-Chul; Chun, Kook Jin; Lee, Wonhee

doi:10.1016/j.cap.2019.11.020

Development and application of chip calorimeter as an X-ray detector

Current applied physics : the official journal of the Korean Physical Society, v.20 no.2, 2020년, pp.337 - 343

Kim, Jonghyun (Graduate School of Nanoscience and Technology, Korea Advanced Institute of Science and Technology (KAIST)) , Nam, Sung Min (Graduate School of Nanoscience and Technology, Korea Advanced Institute of Science and Technology (KAIST)) , Jang, Heejun (Graduate School of Nanoscience and Technology, Korea Advanced Institute of Science and Technology (KAIST)) , Chung, Jae-Pil (Korea Research Institute of Standards and Science (KRISS)) , Kim, Jin Sung (Department of Radiation Oncology, Yonsei Cancer Center, Yonsei University College of Medicine, Yonsei University Health System) , Kim, Byoung-Chul (Korea Research Institute of Standards and Science (KRISS)) , Chun, Kook Jin (Department of Accelerator Science, Korea University Sejong Campus) , Lee, Wonhee (Graduate School of Nanoscience and Technology, Korea Advanced Institute of Science and Technology (K)

Abstract ▼ AI-Helper

Abstract Radiotherapy for cancer patients requires accurate measurement of the absorbed dose of radiation in a treatment planning step. Various types of radiation detectors are currently utilized for dose measurement. Among them, calorimeters are known to be the most precise detector for measuring absorbed dose, but their on-site application is limited by the large size of the equipment. We developed a miniaturized chip calorimeter for application as a radiation detector. The calorimetric radiation detector was built using micro/nano fabrication techniques, and consists of an SU-8 photoresist absorber and high-sensitivity vanadium oxide (VOx) thermistors. The thermistors had a temperature resolution of 135 μK, and the calorimeter showed a thermal conductance of 11 μW/K. The detector was irradiated with various X-ray dose rates from a linear accelerator, and the absorbed dose to SU-8 was measured. The detector responses showed high linearity with dose rates, demonstrating the feasibility of the radiation detector for practical uses. Highlights For the first time, the feasibility of a chip calorimeter as a radiation detector was demonstrated. Microscale radiation absorber of SU-8 was constructed on top of high-sensitivity VOx thermistors. The calorimetric detector enabled precise measurements of X-ray dose rate.

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참고문헌 (36)

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Development and application of chip calorimeter as an X-ray detector

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Development and application of chip calorimeter as an X-ray detector

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