[논문]On-machine calibration of angular position and runout of a precision rotation stage using two absolute position sensors

Kim, Jong-Ahn; Kim, Jae Wan; Kang, Chu-Shik; Lee, Jae Yong; Jin, Jonghan

doi:10.1016/j.measurement.2019.107399

[해외논문] On-machine calibration of angular position and runout of a precision rotation stage using two absolute position sensors

Measurement : journal of the International Measurement Confederation, v.153, 2020년, pp.107399 -

Kim, Jong-Ahn (Center for Optical Metrology, Division of Physical Metrology, Korea Research Institute of Standards and Science) , Kim, Jae Wan (Center for Optical Metrology, Division of Physical Metrology, Korea Research Institute of Standards and Science) , Kang, Chu-Shik (Center for Optical Metrology, Division of Physical Metrology, Korea Research Institute of Standards and Science) , Lee, Jae Yong (Center for Optical Metrology, Division of Physical Metrology, Korea Research Institute of Standards and Science) , Jin, Jonghan (Center for Optical Metrology, Division of Physical Metrology, Korea Research Institute of Standards and Science)

Abstract ▼ AI-Helper

Abstract A calibration method for a precision rotation stage is proposed to evaluate angular position error and runout of the stage with robustness to alignment error and a simple setup. It consists of two absolute position sensors and a two-dimensional (2D) scale. Therefore, it is proper for on-machine calibration where enough install place and fine adjustment might be unavailable. Angular positions are obtained using two coordinate values on the 2D scale fixed on the rotating plate, and the complete runout is calculated by processing these values through Fourier analysis. The calibrated angular positions of a rotation stage agreed with the reference values within ±1″. The proposed system measured runout with the repeatability of 80 nm and error of 120 nm. An effective compensation method for measurement error caused by out-of-plane motion of the rotation stage was discussed and its feasibility was proved though experiments. Highlights A precision rotation stage was calibrated using two absolute position sensors. Angular position and runout of a rotation stage could be obtained simultaneously. The calibrated angular positions agreed with the reference values within ±1″. The runout was measured with the repeatability of 80 nm and error of 120 nm. The proposed method would be applied to on-machine calibration effectively.

Keyword

참고문헌 (16)

Metrologia Just 40 288 2003 10.1088/0026-1394/40/5/011 Calibration of high-resolution electronic autocollimators against an angle comparator

상세보기
Meas. Sci. Technol. Probst 9 1059 1998 10.1088/0957-0233/9/7/009 The new PTB angle comparator

상세보기
10.1063/1.3663612 J.-A. Kim J. W. Kim, C.-S. Kang, J. Jin, T. B. Eom, High-precision angle generator using multiple ultrasonic motors and a self-calibratable encoder, Rev. Sci. Instrum. 82 (2011) 116108-1.

상세보기
ANSI/ASME B89.3.4 2010, Axes of rotation methods for specifying and testing, (2010).
Metrologia Kinnane 52 244 2015 10.1088/0026-1394/52/2/244 A simple method for high-precision calibration of long-range errors in an angle encoder using an electronic nulling autocollimator

상세보기
Metrologia Mendenhall 53 933 2016 10.1088/0026-1394/53/3/933 Characterization of a self-calibrating, high-precision, stacked-stage, vertical dual-axis goniometer

상세보기
Heidenhain, Angle encoders without integral bearing, (2007).
Prec. Eng. Lu 35 73 2011 10.1016/j.precisioneng.2010.08.005 A new method for characterizing axis of rotation radial error motion: Part 1. Two-dimensional radial error motion theory

상세보기
Prec. Eng. Lu 35 95 2011 10.1016/j.precisioneng.2010.08.006 A new method for characterizing axis of rotation radial error motion: Part 2. Experimental results

상세보기
10.1016/j.measurement.2019.01.089 H. Cui, D. Lei, X. Zhang, H. Lan, Z. Jiang, L. Kong, Measurement and analysis of the radial motion error of aerostatic ultra-precision spindle, Measurement 137 (2019) 624-635.

상세보기
10.1016/j.precisioneng.2013.12.011 S. Cappa, D. Reynaerts, F. Al. Bender, A sub-nanometre spindle error motion separation technique, Prec. Eng. 38 (2014) 458-471.

상세보기
Prec. Eng. Anandan 43 119 2016 10.1016/j.precisioneng.2015.07.002 A multi-orientation error separation technique for spindle metrology of miniature ultra-high-speed spindles

상세보기
M. Madden, M. Aketagawa, T. Kumagai, Y. Maeda, E. Okuyama, Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers, Meas. Sci. Technol. 25 (2014) 094005 1-11.
Rev. Sci. Instrum. Li 88 2017 10.1063/1.4991058 A novel optical rotary encoder with eccentricity self-calibration ability

상세보기
T. Watanabe, Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring functions, US patent, US 9,146,136 B2, 2015.
Rev. Sci. Instrum. Kim 89 2018 10.1063/1.5022717 Note: An absolute X-Y-position sensor using a two-dimensional phase-encoded binary scale

상세보기

LOADING...

활용도 분석정보

상세보기

다운로드

내보내기

활용도 Top5 논문

해당 논문의 주제분야에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.

원문 URL 링크

DOI : 10.1016/j.measurement.2019.107399
Elsevier : 저널 > 논문

*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.

저작권 관리 안내

내보내기 메뉴

내보내기 구분

파일저장
인쇄
메일전송

구성항목

기본정보
상세정보

관리번호, 논문명, 저널/프로시딩명, 저자 , 발행년, 권, 호, 시작페이지, 끝페이지, 발행기관

저장형식

Text(ASCII format)
Excel format
RefWorks Direct Export
RIS format (for Reference Manager, ProCite, EndNote), Scholar's Aids, Mendeley

메일정보

받는사람 (필수): @
보내는사람 (선택): @
제목
내용: KISTI 검색결과 이메일 서비스

안내

총 건의 자료가 검색되었습니다.

다운받으실 자료의 인덱스를 입력하세요. (1-10,000)

검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다.

데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요)

다운로드 파일은 UTF-8 형태로 저장됩니다.
파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오.

Text(ASCII format)
Excel format

표제어: PCR

동의어: Packet Collision Rate

용어 설명 출처 목록 (6)

용어 설명: PCR은 세균 특이성이 있는 primer를 이용하여 적은 수의 세균이 있을지라도 쉽게 검출할 수 있는 유용한 방법이며, 이를 이용하여 구강 내 치면세균막이나 타액에서 직접 세균을 검출할 수 있게 되었다[8].

AI-Helper ※ AI-Helper는 을 사용합니다.

AI-Helper

안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

연합인증