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Vacuum, v.178, 2020년, pp.109452 -
Grzebyk, Tomasz (Corresponding author.) , Turczyk, Krzysztof , Szyszka, Piotr , Górecka-Drzazga, Anna , Dziuban, Jan
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Abstract This paper presents a pressure control system designed for MEMS (Micro-Electro-Mechanical System) devices working in vacuum conditions, especially for a currently developed miniature mass spectrometer. It is based on an idea to set the vacuum level inside a MEMS in a dynamic way. This is a...
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