Abstract ▼ AI-Helper

Although the MEMS element is made through a very precise manufacturing process, usually there is the difference between the modeling design and the actual product. So tuning is required. Through the frequency tuning(changing the characteristics of device), we can calibrate the fabrication error and ...

Although the MEMS element is made through a very precise manufacturing process, usually there is the difference between the modeling design and the actual product. So tuning is required. Through the frequency tuning(changing the characteristics of device), we can calibrate the fabrication error and uncertainty. I'll propose the method of changing the natural frequency through the imposing the axial force on the anchor part to separate the sensing part and the tuning part. When the shape of section is the form of rectangular, the degree of the natural frequencies' change under axial force appears D be different. Applying a tuning force of 30 $\mu$N, the natural frequencies' difference can be reduced by 5 percent.