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NTIS 바로가기Advanced Semiconductor Devices&Microsystems (ASDAM), 2010 8th International Conference on, 2010 Oct, 2010년, pp.73 - 76
Novotný, I (Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia) , Kotorová, D (Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia) , Flickyngerová, S (Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia) , Tvarožek, V (Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia) , Spiess, L (Dept. of Mater. for Electron., Ilmenau Univ. of Technol., Ilmenau, Germany) , Schaaf, P (Dept. of Mater. for Electron., Ilmenau Univ. of Technol., Ilmenau, Germany) , Netrvalová, M (Dept. of Mater. &) , Šutta, P (Technol., Univ. of West Bohemia, Plzen, Czech Republic)
A study of the effect of substrate temperature on oblique-angle sputtered galium-doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 × 10-3 Ωcm together with an increase o...
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